JPS63169567A - Probe for probe card - Google Patents

Abstract

PURPOSE:To easily correct the position shift of a probe for a probe card even if the probe shifts in position by using shape memory alloy for the probe. CONSTITUTION:A figure (a) shows that an inspection hole 3 is formed in the center part of the substrate 2 of the probe card 1 and probes 4 for the probe card which are made of shape memory alloy are arrayed and fixed penetrating the flank side of the substrate 2. Then the card 1 is set on an inspecting device and the probes 4 are brought into contact with electrodes 6 of an electronic device 5 shown in a figure (b) to perform specific inspection. The probes 4 deforms as the number of times of inspection increases and the tip parts of the probes 4 shift in position. For the purpose, the whole card 1 is heated up to temperature at which the shapes of the probes 4 are restored to the original shape, and thus the probes 4 are easily corrected to their positions.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a probe card used in an apparatus for testing the electrical characteristics of electronic devices such as integrated circuit wafers, thermal heads, and image sensors. It relates to a probe that is brought into contact with an electrode.

[Conventional technology]

Conventionally, the electrical characteristics of electronic devices such as integrated circuit wafers, thermal heads, and image sensors have been tested by using a probe card to bring the probe of the probe into contact with the electrode of the electronic device, and then inspecting the conductive wire drawn out from the probe. A predetermined inspection is being performed by an inspection device that is in contact with the person. Also,
Automatic inspection equipment with a structure in which the stage on which the electronic device is set is automatically moved intermittently, and the probe for the probe card comes into contact with or separates from the electronic device accordingly, is in widespread use. This equipment makes it easy to perform multiple tests.

[Problem that the invention seeks to solve]

However, the above-mentioned conventional probe card probes are easily plastically deformed due to repeated contact with the electrodes or due to incorrect handling, resulting in a problem in that the probes become misaligned and inspection becomes impossible. was. In this case, it is necessary to correct the positional deviation of the probe, but in the case of conventionally used materials such as tungsten, it is necessary to correct the positional deviation by bending each very thin probe one by one. However, this method requires very complicated manual work to replace the probe, and also increases inspection costs.

The present invention solves the above problem, and by using a shape memory alloy as the material of the probe for a probe card, even if the probe is misaligned, it can be easily returned to its original position by heating the probe. An object of the present invention is to provide a probe for a probe card that allows the probe to be modified.

[Means for solving problems]

To this end, the probe for a probe card of the present invention is characterized in that the cough probe is formed of a shape memory alloy in a probe card having a large number of probes capable of contacting the electrodes of an electronic device.

[Effect]

In the present invention, when the tip of the probe card tip becomes misaligned due to deformation of the probe card probe as the number of tests increases, the test becomes impossible or the reliability of the test decreases. In this method, the position of the probe is corrected by heating the entire probe card to a temperature at which the shape of the probe returns to its original shape.

[Examples] Examples of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing a schematic configuration example of a probe card according to the present invention, FIG. 2 is a perspective view showing an electronic device to be tested by the probe card, and FIG. 3 is a cross-section of a probe for a probe card according to the present invention. It is a diagram.

In FIG. 1, an inspection hole 3 is formed in the center of a substrate 2 of a probe card 1, and a large number of probe card probes 4 are arranged and fixed in the inspection hole 3 by penetrating the side surface of the substrate 2. ing.

The probe 4 for the probe card is made of a shape memory alloy that stores a predetermined shape in advance and returns to its original memorized shape by heating to a predetermined temperature even if it is deformed by stress afterwards. Examples of shape memory alloys include NiTi, CuZnAl, CuAlN1, etc. Also, select one that has an appropriate temperature difference between the temperature at which it returns to its original shape and the temperature at the time of actual inspection. . Such a shape memory alloy is processed into a wire shape, then cut into a predetermined length, and the tip portion is bent and polished to form the shape shown in FIG. After this shape is memorized by hardening at a high temperature, it is fixed to the probe card board 2 so that the arrangement corresponds to the arrangement of the electrodes of the electronic device to be inspected, and the probes 4 are connected via conductive wires. Then, a probe card l is created.

The probe card 1 thus produced is set in an inspection device, and a predetermined inspection is performed by bringing the probe card probe 4 into contact with the electrode 6 of the electronic device 5 shown in FIG. 2.

If the tip of the probe card probe 4 becomes misaligned due to deformation of the probe card probe 4 as the number of inspections increases, and inspection becomes impossible or reliability of the inspection decreases, the probe Probe card probe 4
The position of the probe is corrected by heating it to a temperature that restores the shape to its original shape.

For example, the ratio of Ti and Ni is 49°s:so in terms of atomic ratio.
A case will be described in which a wire with a wire diameter of 125 μm made of a T1Ni alloy of . At this time, the temperature at which it begins to return to its original state is 75 degrees C1, and the temperature at which it completely returns to its original state is 92 degrees Celsius.
It was degree C.

This probe is fixed with resin on the probe card board 2 so as to correspond to the arrangement of the electrodes 6 of the electronic device 5 shown in FIG. 2 to create a probe card 1. When the electronic device 5 shown in FIG. 2 was contacted 4500 times with an overdrive width of 0.1 mm, there were three probes 4 that were deviated from the electrode by an average of 37 μm from the initial position. When these probes were heated to 95 degrees Celsius together with the probe card, the misalignment with the electrodes was corrected to an average of 0.5 μm, and they almost completely returned to their initial positions, allowing normal testing.

[Effects of the Invention] As explained above, according to the present invention, by using a shape memory alloy as the material of the probe for a probe card,
Even if a positional shift occurs due to deformation of the probe, the probe can be easily corrected to its original position by heating the entire probe card. This eliminates the need for precise work to correct the probe and the complicated manual work of replacing expensive probes.The simple configuration allows the position of the probe card probe to be easily corrected, reducing costs and improving inspection. Efficiency can be improved.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a schematic configuration example of a probe card according to the present invention, FIG. 2 is a perspective view showing an electronic device to be inspected by the probe card, and FIG. 3 is a cross-section of a probe for a probe card according to the present invention. It is a diagram. DESCRIPTION OF SYMBOLS 1... Probe card, 2... Substrate, 4... Probe card probe, 5... Electronic device, 6... Electrode. Applicant: Fuji Xerox Co., Ltd. Representative Patent Attorney
Hiroki Shirai (2 others) Fig. 1 Main board Fig. 2 1iB

Claims (1)

[Claims] (1) A probe card for a probe card having a large number of probes capable of contacting electrodes of an electronic device, characterized in that the probes are made of a shape memory alloy.