JPS6316854B2 - - Google Patents

Info

Publication number
JPS6316854B2
JPS6316854B2 JP56179619A JP17961981A JPS6316854B2 JP S6316854 B2 JPS6316854 B2 JP S6316854B2 JP 56179619 A JP56179619 A JP 56179619A JP 17961981 A JP17961981 A JP 17961981A JP S6316854 B2 JPS6316854 B2 JP S6316854B2
Authority
JP
Japan
Prior art keywords
extraction electrode
shaft
sliding member
ion source
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56179619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5882447A (ja
Inventor
Haruto Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP56179619A priority Critical patent/JPS5882447A/ja
Publication of JPS5882447A publication Critical patent/JPS5882447A/ja
Publication of JPS6316854B2 publication Critical patent/JPS6316854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP56179619A 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置 Granted JPS5882447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56179619A JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56179619A JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Publications (2)

Publication Number Publication Date
JPS5882447A JPS5882447A (ja) 1983-05-18
JPS6316854B2 true JPS6316854B2 (cg-RX-API-DMAC7.html) 1988-04-11

Family

ID=16068915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56179619A Granted JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Country Status (1)

Country Link
JP (1) JPS5882447A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0635363Y2 (ja) * 1988-08-22 1994-09-14 日新電機株式会社 イオン源

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884299A (cg-RX-API-DMAC7.html) * 1972-02-16 1973-11-09
US4017403A (en) * 1974-07-31 1977-04-12 United Kingdom Atomic Energy Authority Ion beam separators
JPS5812973B2 (ja) * 1977-02-25 1983-03-11 三菱電機株式会社 冷陰極放電形イオン源装置
FR2410359A1 (fr) * 1977-11-28 1979-06-22 Anvar Electrode d'extraction mobile pour source d'ions

Also Published As

Publication number Publication date
JPS5882447A (ja) 1983-05-18

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