JPS63168443U - - Google Patents
Info
- Publication number
- JPS63168443U JPS63168443U JP1987059996U JP5999687U JPS63168443U JP S63168443 U JPS63168443 U JP S63168443U JP 1987059996 U JP1987059996 U JP 1987059996U JP 5999687 U JP5999687 U JP 5999687U JP S63168443 U JPS63168443 U JP S63168443U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- forming layer
- mirror
- light source
- source side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987059996U JPS63168443U (cs) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987059996U JPS63168443U (cs) | 1987-04-20 | 1987-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63168443U true JPS63168443U (cs) | 1988-11-02 |
Family
ID=30892014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987059996U Pending JPS63168443U (cs) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63168443U (cs) |
-
1987
- 1987-04-20 JP JP1987059996U patent/JPS63168443U/ja active Pending
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