JPS63168099A - Electronic parts mounter - Google Patents

Electronic parts mounter

Info

Publication number
JPS63168099A
JPS63168099A JP61311948A JP31194886A JPS63168099A JP S63168099 A JPS63168099 A JP S63168099A JP 61311948 A JP61311948 A JP 61311948A JP 31194886 A JP31194886 A JP 31194886A JP S63168099 A JPS63168099 A JP S63168099A
Authority
JP
Japan
Prior art keywords
electronic component
rotational
mounting
drive
origin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61311948A
Other languages
Japanese (ja)
Inventor
寿人 田中
宏一 千葉
兼田 克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61311948A priority Critical patent/JPS63168099A/en
Publication of JPS63168099A publication Critical patent/JPS63168099A/en
Pending legal-status Critical Current

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  • Supply And Installment Of Electrical Components (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、半導体装置例えばフラットパッケージIC等
の電子部品を基板上に自動的に取付ける電子部品の実装
装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an electronic component mounting apparatus for automatically mounting electronic components such as semiconductor devices, such as flat package ICs, on a substrate.

(従来の技術) 従来より、第5図に示すように、電子部品1の本体部分
2の各辺のリード列3をほぼ水平方向に突設した電子部
品1を基板(図示せず)上の所定の取付は位置へ搭載す
る場合には、自動実装装置が用いられている。
(Prior Art) Conventionally, as shown in FIG. 5, an electronic component 1 having lead rows 3 on each side of a main body portion 2 of the electronic component 1 protruding approximately horizontally is mounted on a substrate (not shown). An automatic mounting device is used for mounting at a predetermined location.

このような実装装置として、例えば電子部品1を吸着し
て基板上の所定の場所にrF!裁するためのシ?降・回
転機能を有する吸着ヘッド部と、この吸着ヘッド部を搭
載して基板上のX−Y方向に該吸着ヘッドを移動させる
X−Yテーブルを偏えたヘッド搭載部と、ヘッド搭載部
前面に配置され基板をiI!置する基板a置台と上記各
機構を制御する制御部および操作部からなる装置マウン
ト部等から主要部分が構成されたものが知られている。
As such a mounting device, for example, the electronic component 1 is sucked and placed at a predetermined location on the board using rF! Shi to judge? A suction head section with a lowering/rotation function, a head mounting section with a biased X-Y table that mounts this suction head section and moves the suction head in the X-Y direction on the substrate, and a head mounting section on the front surface of the head mounting section. II the placed board! A device is known in which the main parts are composed of a device mount section, etc., which is made up of a substrate mounting table, a control section for controlling each of the above-mentioned mechanisms, and an operation section.

この実装装置にて基板−1−に電子部品1を搭載し、次
工程で電子部品1のリード列3と基板上のリードパター
ンとの半田付けを行う。
The electronic component 1 is mounted on the board-1- by this mounting device, and in the next step, the lead array 3 of the electronic component 1 and the lead pattern on the board are soldered.

このような実装装置では、予めチップトレーに収容され
ている電子部品を吸着ヘッド部の吸着端子で真空チャッ
クした後、ヘッド搭載部のX−Y15に動機構により基
板」二の所定の搭載位置まで搬送し水平面の位置合せを
行う。
In such a mounting device, electronic components housed in a chip tray are vacuum-chucked in advance using the suction terminals of the suction head section, and then moved to a predetermined mounting position on the board by an X-Y15 movement mechanism of the head mounting section. Transport and align the horizontal plane.

そして、吸着ヘッドの回転機構により電子部品1の回転
方向の位置合ぜをし、吸着端子を下降させて電子部品1
を基板上の所定の位置にMI!する。
Then, the rotation mechanism of the suction head aligns the position of the electronic component 1 in the rotational direction, and the suction terminal is lowered to remove the electronic component 1.
MI! to a predetermined position on the board. do.

このとき一連の回転補正は、吸着ヘッドの回転軸に設け
られた例えばロータリーエンコーダ等の回1五角度検出
機構からの角度情報と、予め実装装置CPUの記憶機構
に入力されている各電子部品の実装位置情報に基づいて
、回転角度補正機構により回転補正を行っていた。
At this time, a series of rotation corrections is performed using angle information from a rotation angle detection mechanism such as a rotary encoder provided on the rotation axis of the suction head and information on each electronic component that has been input in advance to the storage mechanism of the mounting device CPU. Rotation correction was performed using a rotation angle correction mechanism based on the mounting position information.

(発明が解決しようとする問題点) しかしながら上述した実装装置では、ヘッド搭載部が回
転する構造のため、移動時における各移動機構の機械的
な誤差により回転軸にずれが生じる場合がある。このよ
うなずれが生じると、実際に電子部品の回転補正をする
際に予め記憶機構に入力されている電子部品の位置惜報
に基づいて回転角度の補正を行っても、機械的な誤差に
J、るずれが生じているため、正確な位置合せができな
いという問題があった。
(Problems to be Solved by the Invention) However, in the above-mentioned mounting apparatus, since the head mounting portion is structured to rotate, the rotation axis may be misaligned due to mechanical errors in each moving mechanism during movement. If such a deviation occurs, even if the rotation angle is corrected based on the position information of the electronic component that has been input into the storage mechanism in advance when actually correcting the rotation of the electronic component, mechanical errors will occur. J. Due to misalignment, there was a problem in that accurate alignment was not possible.

本発明は上述した問題点を解決するためになされ赳もの
で、高精度な実装が可能な電子部品の実装装置を提供す
ることを目的とする。
The present invention was made in order to solve the above-mentioned problems, and an object of the present invention is to provide an electronic component mounting apparatus that can perform highly accurate mounting.

[発明の構成] (問題点を解決するための手段) 本発明の電子部品の実装装置は、基板」二の所定の位置
に電子部品を実装する装置において、先端に電子部品を
保持する電子部品保持機構と、前記電子部品の回転方向
の位置が基板上の所定の実装位置に位置合せするように
前記電子部品保持機構を回転させる回転駆動機構と、前
記電子部品保持機構を3次元方向に移動させる3次元駆
動機構と、前記電子部品保持機構の回転変位を検・出す
る回転変位検出V1柘と、前記電子部品保持機構の予め
定められた回転方向の原点位置と前記回転軸とのずれ屋
を検出する原点変位検出機構と、前記回転変位検出機構
と前記原点変位検出R椹からの情報に基づき前記電子部
品が前記基板上の所定の位置に実装するように上記回転
駆動機構および3次元駆動機梢の駆動補正制御を行う駆
動補正制御機構とを呉備したことを特徴とするものであ
る。
[Structure of the Invention] (Means for Solving the Problems) The electronic component mounting apparatus of the present invention is an apparatus for mounting electronic components at a predetermined position on a substrate. a holding mechanism; a rotation drive mechanism that rotates the electronic component holding mechanism so that the position of the electronic component in the rotational direction is aligned with a predetermined mounting position on the board; and moving the electronic component holding mechanism in a three-dimensional direction. a three-dimensional drive mechanism for detecting rotational displacement of the electronic component holding mechanism; a rotational displacement detection V1 for detecting rotational displacement of the electronic component holding mechanism; and a deviation between the origin position of the electronic component holding mechanism in a predetermined rotational direction and the rotation axis. the rotational drive mechanism and three-dimensional drive so that the electronic component is mounted at a predetermined position on the board based on information from the rotational displacement detection mechanism and the origin displacement detection mechanism; The present invention is characterized in that it is equipped with a drive correction control mechanism that performs drive correction control of the top of the machine.

(作 用) 電子部品保持部の回転軸に設けられた原点位置検出n格
により、回転軸のずれ量情報を予め求め、該情報に基づ
き駆動制御信号を補正することで、(i置台せ時におけ
る回転軸の機械的なずれが生じても高精度な位置合せが
実現できる。
(Function) Information on the amount of deviation of the rotation axis is obtained in advance using the origin position detection unit provided on the rotation axis of the electronic component holder, and the drive control signal is corrected based on this information. Highly accurate positioning can be achieved even if mechanical misalignment of the rotation axis occurs.

(実施例) 以下本発明の一実施例について図を参照にしながら説明
する。
(Example) An example of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例の実装装置を示す図で、X 
1ull !累動機Wi21およびY軸駆動機構22に
より駆動されるX−Yテーブル23上にはマウントヘッ
ド部24が搭載されている。
FIG. 1 is a diagram showing a mounting apparatus according to an embodiment of the present invention.
1ull! A mount head section 24 is mounted on an XY table 23 driven by a cumulative machine Wi21 and a Y-axis drive mechanism 22.

このマウントヘッド部211には、Z軸駆動機構25に
連結されたZ軸テーブル26が取付けられており、この
Z軸テーブル26側面には下方に向かって回転駆動部2
7、吸着ヘッド28、連結器29、細円筒状の吸着工旦
軸30、電子部品を吸着把持する吸着端子31が一体と
なって取付けられている。上記X−Y軸テーブル23、
Z軸テーブル26および回転駆動部27により吸着端子
31が3次元方向および回転方向へ移動可能となってい
る。
A Z-axis table 26 connected to a Z-axis drive mechanism 25 is attached to the mount head section 211, and a rotary drive section 2 is attached to the side surface of the Z-axis table 26 downward.
7. A suction head 28, a coupler 29, a slender cylindrical suction shaft 30, and a suction terminal 31 for suctioning and gripping electronic components are integrally attached. the X-Y axis table 23;
The Z-axis table 26 and the rotation drive unit 27 allow the suction terminal 31 to move in three-dimensional directions and rotational directions.

一方X−Yテーブル23前面には、基板32をarf′
!、するa置台33、操作盤34、制則機信を収容した
電装部35等を備えた装置マウント部36が配置されて
いる。
On the other hand, the board 32 is placed in front of the X-Y table 23 by arf'
! A device mount section 36 is disposed, which includes a stand 33, an operation panel 34, an electrical equipment section 35 containing control signals, and the like.

上記マウントヘッド部24の構成を第2図を参照にしな
がら説明する。
The structure of the mount head section 24 will be explained with reference to FIG. 2.

吸着端子31を下端に備えた電子部品1の回転軸となる
細円筒状の吸着工具軸30にはこれと同軸にウオームホ
イール41aが取付けられており、このウオームホイー
ル41aに歯合したウオーム41bによりウオームf1
m41が構成されている。
A worm wheel 41a is attached coaxially to the slender cylindrical suction tool shaft 30, which serves as the rotation axis of the electronic component 1 equipped with the suction terminal 31 at the lower end. worm f1
m41 is configured.

このつ1−ム機構41のウオーム41bに連結した角度
補正yiA動機横42により吸着端子31に吸着した電
子部品1の回転方向の位置合せがなされ、さらにX−Y
−Zテーブル49により吸着工具軸30のX−Y方向の
位置合せが行われる。
The electronic component 1 adsorbed to the adsorption terminal 31 is aligned in the rotational direction by the angle correction yiA motor side 42 connected to the worm 41b of the arm mechanism 41, and further
- The Z table 49 aligns the suction tool shaft 30 in the X-Y direction.

また吸着工具軸30には、ロータリーエンコーダ等の回
転角度検出機構43が配置されており、現状態の吸着工
具軸30の角度変位の情報を実装装WCPU46内の記
憶10147に入力するように構成されている。
Further, a rotation angle detection mechanism 43 such as a rotary encoder is disposed on the suction tool shaft 30, and is configured to input information on the angular displacement of the suction tool shaft 30 in the current state to the memory 10147 in the mounting device WCPU 46. ing.

吸着工具軸30と回転角度検出11椹43との軸間には
原点位置検出機構51が装着されており、回転軸即ち吸
着工具軸30の回転方向の所定の位置例えば原点位置の
検出を行う、これら回転角度検出機枯43、原点位置検
出lit椹51および実装装置C)’ U 46の記憶
n横47に予め入力されている各電子部品の位置情報に
基づいてNA+jJ制御機1444が角度補正駆動11
[42およびX−Y−Z駆動a描43を制御する。
An origin position detection mechanism 51 is installed between the suction tool shaft 30 and the rotation angle detection 11 and 43, and detects a predetermined position in the rotational direction of the rotation axis, that is, the suction tool shaft 30, for example, the origin position. The NA+JJ controller 1444 performs angle correction drive based on the position information of each electronic component that has been input in advance to the memory n side 47 of the rotation angle detector 43, the origin position detector 51, and the mounting device C)'U 46. 11
[42 and control the X-Y-Z drive a-drawing 43.

に記原点位置検出機構51の構成の一例を第3し1に示
す。
An example of the configuration of the origin position detection mechanism 51 is shown in Part 3 and 1.

原点位置検出機構51は吸着工具軸30上に配置された
原点検出用ホイール52とこの原点検出用ホイール52
上に垂設された円柱状の反射体53と、この反射体53
の反射光を検出する物体検出器54例えばフォトセンサ
とから構成されており、物体検出器54で検出した反射
体53の位置情報信号は実装装置CPU46の記憶装置
47に入力される。
The origin position detection mechanism 51 includes an origin detection wheel 52 arranged on the suction tool shaft 30 and this origin detection wheel 52.
A cylindrical reflector 53 vertically installed above and this reflector 53
The position information signal of the reflector 53 detected by the object detector 54 is input to the storage device 47 of the mounting apparatus CPU 46.

この物体検出器54により反射体53と吸着工具軸30
の回転軸とのずれ量を検出することで、吸着工具軸30
の回転軸と反射体53との距離を求めることができ、例
えば第4図に示すように反射体53の任意の位置を基準
位置例えば原点とし、そのときの角度を0とおけば、原
点からの回転軸角度をX軸、反射体53と回転軸とのず
れ量をY軸にとればこれら関係は正弦波として表すこと
ができる。従って該情報から回転軸の原点からのずれ星
を求めることができる。
The object detector 54 detects the reflector 53 and the suction tool shaft 30.
By detecting the amount of deviation from the rotation axis of the suction tool axis 30,
The distance between the axis of rotation of the reflector 53 and the reflector 53 can be determined. For example, as shown in FIG. If the angle of the rotation axis is taken as the X axis, and the amount of deviation between the reflector 53 and the rotation axis is taken as the Y axis, these relationships can be expressed as a sine wave. Therefore, from this information, it is possible to determine the deviation star of the rotation axis from the origin.

このような構成の実装装置についての動作を以下に説明
する。
The operation of the mounting apparatus having such a configuration will be described below.

予めチップトレー45に収容されている電子部品1を吸
着端子31で吸着把持した後、回転角度検出nM43と
原点検出機構51からの情報および予め実装装置CPU
46の記憶a格47に入力されている電子部品位置情報
に基づきX−Yテーブル23をrgA動して基板32上
の電子部品1を搭載すべき所定の位置へと搬送してここ
でX−Y方向の位置合せを行い、li′i1様な制御で
角度補正駆動機構42により吸着工具軸29を回転させ
て電子部品1の回転方向の位置合せを行なう、そしてZ
軸デープル26を駆動して吸着端子31を下降さぜ電子
部品1を基板32上の所定の位置に搭載する。
After holding the electronic component 1 housed in the chip tray 45 in advance by suction with the suction terminal 31, information from the rotation angle detection nM43 and the origin detection mechanism 51 and the mounting device CPU are collected in advance.
The X-Y table 23 is moved rgA based on the electronic component position information input in the memory 47 of the board 32 to transport the electronic component 1 on the board 32 to a predetermined position where the electronic component 1 is to be mounted. Positioning is performed in the Y direction, and the suction tool shaft 29 is rotated by the angle correction drive mechanism 42 under control such as li'i1 to perform positioning in the rotational direction of the electronic component 1.
The shaft taple 26 is driven to lower the suction terminal 31 and the electronic component 1 is mounted at a predetermined position on the board 32.

ところでこのような実装装置では、吸着端子31が回転
する構造となっているため、回転時における機械的誤差
により回転軸がずれる場合があり、このような場合には
回転軸のずれにより、原点不一致を招き、予め記憶機′
Wi47に入力されている各電子部品の位置情報だけで
は正確な位置合せが不可能となるので、原点位置検出1
11 rA 51によりこの回転軸のずれ崖を検出して
、予めそのずれ;。
By the way, in such a mounting device, since the suction terminal 31 is structured to rotate, the rotation axis may shift due to mechanical error during rotation.In such a case, the origin may be mismatched due to the rotation axis shift. Invite the memory machine in advance
Since accurate alignment is impossible with only the position information of each electronic component input to Wi47, origin position detection 1
11 rA 51 detects the deviation cliff of this rotation axis and determines the deviation in advance.

分の補正を行う、即ち記憶機構l17には、原点検出用
ホイール52上に設けられた反射体53と物体検出器5
4により求めた回転軸の回転角度と反射体53のずれ量
との相関関係(第4図)をずれ星情報として予め入力さ
れているので、このずれ星情報に基づいて駆動制御信号
を補正して出力する。
In other words, the storage mechanism l17 includes a reflector 53 provided on the origin detection wheel 52 and an object detector 5.
Since the correlation between the rotation angle of the rotation axis obtained in step 4 and the amount of deviation of the reflector 53 (Fig. 4) is input in advance as misaligned star information, the drive control signal is corrected based on this misaligned star information. and output it.

このように回転軸の回転方向の任意の位置を基準例えば
原点とし、この原点から回転軸のずれ量と回転軸の回転
角度との情報を予め求め、この情報に基づいて駆動制御
信号を補正することで駆動系の機械的な誤差による回転
軸のずれが生じても正確な位置合せを行うことができる
In this way, an arbitrary position in the rotational direction of the rotational axis is set as a reference, for example, the origin, information on the amount of deviation of the rotational axis and the rotation angle of the rotational axis is obtained from this origin in advance, and the drive control signal is corrected based on this information. This allows accurate positioning even if the rotational axis shifts due to mechanical errors in the drive system.

」ユ述実施例では、回転軸の原点検出手段として回転軸
と同軸に設けられた回転板上の反射体を物体検出器で検
出する手段を用いたが、本発明はこれに限定されず、例
えば絶対的な角度変位を検出できる機能を有したロータ
リーエンコーダを用いてもよい。
In the embodiment described above, a means for detecting a reflector on a rotary plate coaxially with the rotary shaft using an object detector was used as a means for detecting the origin of the rotary shaft, but the present invention is not limited to this. For example, a rotary encoder having a function of detecting absolute angular displacement may be used.

[発明の効果コ 以上講明したように本発明の実装装置によれば、電子部
品保持部の回転軸にずれが発生しても常に正確な位置合
せが可能となる。
[Effects of the Invention] As explained above, according to the mounting apparatus of the present invention, accurate positioning is always possible even if a shift occurs in the rotation axis of the electronic component holding section.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による一実施例の実装装置の外観を示す
斜視図、第2図は第1図の吸着ヘッド部の構成を示す図
、第3図は原点位置検出機構の一例の構成を示す図、第
4図は回転軸の回転角度と回転軸のずれ量との相関関係
を示す図、第5図は電子部品を示ず平面図である。 1・・・・・・・・・電子部品 23・・・・・・・・・X−Yテーブル24・・・・・
・・・・マウントヘッド部26・・・・・・・・・Z軸
・Σ−−プル27・・・・・・・・・回転駆動(μ構2
8・・・・・・・・・吸着ヘッド 30・・・・・・・・・吸着工具軸 31・・・・・・・・・吸着端子 32・・・・・・・・・基板 、′11・・・・・・・・・回転駆動機拓・′12・・
・・・・・・・角度補正駆動機構43・・・・・・・・
・回転角度検出機構44・・・・・・・・・駆動制御機
構 116・・・・・・・・・実装装置CPU・17・・・
・・・・・・記Pi機構 119・・・・・・・・・X−Y−Z駆!lJ機構51
・・・・・・・・・原点位置検出機構52・・・・・・
・・・原点検出用ホイール53・・・・・・・・・反射
体 54・・・・・・・・・物体検出器 出願人       株式会社 東芝 代理人  弁理士  須 山 佐 − 第 1図 第3図 第4図 第5図
FIG. 1 is a perspective view showing the external appearance of a mounting apparatus according to an embodiment of the present invention, FIG. 2 is a diagram showing the configuration of the suction head section of FIG. 1, and FIG. 3 is a diagram showing the configuration of an example of the origin position detection mechanism. FIG. 4 is a diagram showing the correlation between the rotation angle of the rotating shaft and the amount of deviation of the rotating shaft, and FIG. 5 is a plan view without showing electronic components. 1......Electronic components 23...X-Y table 24...
...Mount head section 26...Z-axis/Σ-pull 27...Rotation drive (μ structure 2
8...Suction head 30...Suction tool shaft 31...Suction terminal 32...Substrate,' 11...Rotary drive machine Taku・'12...
......Angle correction drive mechanism 43...
- Rotation angle detection mechanism 44... Drive control mechanism 116... Mounting device CPU 17...
......Pi mechanism 119......X-Y-Z drive! lJ mechanism 51
......Origin position detection mechanism 52...
... Wheel for origin detection 53 ... ... Reflector 54 ... ... Object detector Applicant Toshiba Corporation Representative Patent attorney Satoshi Suyama - Figure 1, Figure 3 Figure 4 Figure 5

Claims (2)

【特許請求の範囲】[Claims] (1)基板上の所定の位置に電子部品を実装する装置に
おいて、 先端に電子部品を保持する電子部品保持機構と、前記電
子部品の回転方向の位置が基板上の所定の実装位置に位
置合せするように前記電子部品保持機構を回転させる回
転駆動機構と、前記電子部品保持機構を3次元方向に移
動させる3次元駆動機構と、前記電子部品保持機構の回
転変位を検出する回転変位検出機構と、前記電子部品保
持機構の予め定められた回転方向の原点位置と前記回転
軸とのずれ量を検出する原点変位検出機構と、前記回転
変位検出機構と前記原点変位検出機構からの情報に基づ
き前記電子部品が前記基板上の所定の位置に実装するよ
うに上記回転駆動機構および3次元駆動機構の駆動補正
制御を行う駆動補正制御機構とを具備したことを特徴と
する電子部品の実装装置。
(1) In an apparatus for mounting electronic components at a predetermined position on a board, an electronic component holding mechanism that holds the electronic component at the tip and a rotational direction position of the electronic component are aligned to a predetermined mounting position on the board. a rotational drive mechanism that rotates the electronic component holding mechanism, a three-dimensional drive mechanism that moves the electronic component holding mechanism in a three-dimensional direction, and a rotational displacement detection mechanism that detects rotational displacement of the electronic component holding mechanism. , an origin displacement detection mechanism that detects a deviation amount between a predetermined origin position of the electronic component holding mechanism in the rotational direction and the rotation axis; An electronic component mounting apparatus comprising: a drive correction control mechanism that performs drive correction control of the rotational drive mechanism and the three-dimensional drive mechanism so that the electronic component is mounted at a predetermined position on the substrate.
(2)原点変位検出機構が、電子部品保持機構の回転軸
と同軸に装着された回転板と、該回転板上に設けた凸部
と、この凸部を検出する物体検出機構とから構成されて
いることを特徴とする特許請求の範囲第1項記載の電子
部品の実装装置。
(2) The origin displacement detection mechanism is composed of a rotary plate mounted coaxially with the rotation axis of the electronic component holding mechanism, a convex portion provided on the rotary plate, and an object detection mechanism that detects the convex portion. An electronic component mounting apparatus according to claim 1, characterized in that:
JP61311948A 1986-12-29 1986-12-29 Electronic parts mounter Pending JPS63168099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61311948A JPS63168099A (en) 1986-12-29 1986-12-29 Electronic parts mounter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61311948A JPS63168099A (en) 1986-12-29 1986-12-29 Electronic parts mounter

Publications (1)

Publication Number Publication Date
JPS63168099A true JPS63168099A (en) 1988-07-12

Family

ID=18023362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61311948A Pending JPS63168099A (en) 1986-12-29 1986-12-29 Electronic parts mounter

Country Status (1)

Country Link
JP (1) JPS63168099A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295299U (en) * 1989-01-17 1990-07-30
JPH03119799A (en) * 1989-10-02 1991-05-22 Sanyo Electric Co Ltd Component mounting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295299U (en) * 1989-01-17 1990-07-30
JPH03119799A (en) * 1989-10-02 1991-05-22 Sanyo Electric Co Ltd Component mounting device

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