JPS63167167U - - Google Patents
Info
- Publication number
- JPS63167167U JPS63167167U JP5835587U JP5835587U JPS63167167U JP S63167167 U JPS63167167 U JP S63167167U JP 5835587 U JP5835587 U JP 5835587U JP 5835587 U JP5835587 U JP 5835587U JP S63167167 U JPS63167167 U JP S63167167U
- Authority
- JP
- Japan
- Prior art keywords
- screen
- evaporation source
- vapor deposition
- utility
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Description
第１図は本考案の一実施例を示したもの、第２
図ａ，ｂはその一部詳細図、第３図は本考案の動
作の説明を補足する為のもの、第４図〜第７図は
従来の機構の説明に用いたものである。
１：蒸発源１、２：チヤンバ壁、３：観察窓、
４′：回転スリツト板、Ｓａ，Ｓｂ：スリツト、
５：モータ、６：防護ガラス板、７：摘子、８Ａ
，８Ｂ：衝立。
Figure 1 shows one embodiment of the present invention, Figure 2 shows an embodiment of the present invention.
Figures a and b are partially detailed views, Figure 3 is used to supplement the explanation of the operation of the present invention, and Figures 4 to 7 are used to explain the conventional mechanism. 1: Evaporation source 1, 2: Chamber wall, 3: Observation window,
4': rotating slit plate, Sa, Sb: slit,
5: Motor, 6: Protective glass plate, 7: Knob, 8A
, 8B: Screen.
Claims (1)
衝立を持つ回転孔板を設けた観察窓の蒸着防止機
構。 A vapor deposition prevention mechanism for observation windows that includes a rotary hole plate with a screen on the rotational side of the hole between the evaporation source and the observation window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835587U JPS63167167U (en) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5835587U JPS63167167U (en) | 1987-04-17 | 1987-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167167U true JPS63167167U (en) | 1988-10-31 |
Family
ID=30888853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5835587U Pending JPS63167167U (en) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167167U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
-
1987
- 1987-04-17 JP JP5835587U patent/JPS63167167U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004205134A (en) * | 2002-12-26 | 2004-07-22 | Toho Titanium Co Ltd | Inspection window for electron beam melting furnace and its operating method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0278293U (en) | ||
| JPS63167167U (en) | ||
| JPS61127390U (en) | ||
| JPH01118573U (en) | ||
| JPS59145996U (en) | Rotating grip type radio controlled transmitter | |
| JPS61125171U (en) | ||
| JPS60952Y2 (en) | Toy with music box | |
| JPH0433652U (en) | ||
| JPH0167152U (en) | ||
| JPS6338944U (en) | ||
| JPH0222363U (en) | ||
| JPS6378395U (en) | ||
| JPS621220U (en) | ||
| JPS62174378U (en) | ||
| JPH03120555U (en) | ||
| JPS6247675U (en) | ||
| JPS61187750U (en) | ||
| JPS61107876U (en) | ||
| JPH0198161U (en) | ||
| JPS6364876U (en) | ||
| JPH01155524U (en) | ||
| JPS5969451U (en) | knob mechanism | |
| JPS6341435U (en) | ||
| JPS6175843U (en) | ||
| JPS63165741U (en) |