JPH0433652U

JPH0433652U -

Info

Publication number: JPH0433652U
Application number: JP7228590U
Authority: JP
Priority date: 1990-07-09
Filing date: 1990-07-09
Publication date: 1992-03-19

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示す断面図、第２
図はその金属円板の詳細図でａは平面図、ｂはａ
図のＡ−Ａ線矢視図、ｃはａ図のＢ−Ｂ線矢視図
、第３図は第１図のＣ−Ｃ線矢視図、第４図は本
考案の他の実施例を示す断面図、第５Ａ図及び第
５Ｂ図は従来例の作動状態を示す断面図、第５Ｃ
図はその金属円板の詳細図でａは平面図、ｂは断
面図、第６図は金属蒸発装置を示す断面図である
。１１……ケーシング、１１ａ……監視窓、１３
……透明ガラス板円板、１６……金属円板、１６
ａ……透視孔、１６ｄ……金属蒸気捕集片。 Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a detailed view of the metal disk, a is a plan view, b is a
Fig. 3 is a view taken along the line A-A in the figure, c is a view taken along the line B-B in Fig. a, Fig. 3 is a view taken along the line C-C in Fig. 1, and Fig. 4 is another embodiment of the present invention. 5A and 5B are sectional views showing the operating state of the conventional example, and 5C is a sectional view showing the operating state of the conventional example.
The figures are detailed views of the metal disk, in which a is a plan view, b is a sectional view, and FIG. 6 is a sectional view showing the metal evaporator. 11...Casing, 11a...Monitoring window, 13
...Transparent glass plate disc, 16...Metal disc, 16
a...See-through hole, 16d...Metal vapor collection piece.

Claims

[Scope of utility model registration request]

A metal evaporator in which a rotatable transparent glass plate disk located on the monitoring window side and a rotating metal disk having a see-through hole facing the glass plate disk are placed side by side in a casing of a metal evaporator maintained in a vacuum. A monitoring device for a metal evaporation device, characterized in that a metal vapor collection piece is provided at the position of the see-through hole of the rotating metal disk.