JPS6316669Y2 - - Google Patents

Info

Publication number
JPS6316669Y2
JPS6316669Y2 JP8346582U JP8346582U JPS6316669Y2 JP S6316669 Y2 JPS6316669 Y2 JP S6316669Y2 JP 8346582 U JP8346582 U JP 8346582U JP 8346582 U JP8346582 U JP 8346582U JP S6316669 Y2 JPS6316669 Y2 JP S6316669Y2
Authority
JP
Japan
Prior art keywords
suction
suction cup
card
adhesive part
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8346582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58187539U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8346582U priority Critical patent/JPS58187539U/ja
Publication of JPS58187539U publication Critical patent/JPS58187539U/ja
Application granted granted Critical
Publication of JPS6316669Y2 publication Critical patent/JPS6316669Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP8346582U 1982-06-07 1982-06-07 カ−ド類の吸着装置用クリ−ニングカ−ド Granted JPS58187539U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8346582U JPS58187539U (ja) 1982-06-07 1982-06-07 カ−ド類の吸着装置用クリ−ニングカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8346582U JPS58187539U (ja) 1982-06-07 1982-06-07 カ−ド類の吸着装置用クリ−ニングカ−ド

Publications (2)

Publication Number Publication Date
JPS58187539U JPS58187539U (ja) 1983-12-13
JPS6316669Y2 true JPS6316669Y2 (cs) 1988-05-12

Family

ID=30092476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8346582U Granted JPS58187539U (ja) 1982-06-07 1982-06-07 カ−ド類の吸着装置用クリ−ニングカ−ド

Country Status (1)

Country Link
JP (1) JPS58187539U (cs)

Also Published As

Publication number Publication date
JPS58187539U (ja) 1983-12-13

Similar Documents

Publication Publication Date Title
JPS6316669Y2 (cs)
JPH03289154A (ja) 半導体ウエーハチャック装置
JPS58140919U (ja) 自動供給装置
JPS5871033U (ja) カ−ド等の吸着取出装置
JP2000247464A (ja) シート材の吸着装置
JPS5838640U (ja) 弾性薄板の取出し装置
JP2004273529A (ja) ダイピックアップ装置
JPH0737317Y2 (ja) ウエハ搬送フォーク
JP2513670Y2 (ja) 水平搬送ｉｃ搬送装置のデバイスコンタクトユニット
JPH06216168A (ja) 半導体装置の製造装置
JPS6037151U (ja) ストッパ−式スイッチ装置
JPS5850310A (ja) 吸着パッド
JPH0322730Y2 (cs)
JPS62148179A (ja) 真空吸着装置
JPS59123038U (ja) 薄板吸着装置
JPS605567U (ja) 紙葉類処理機におけるセンサクリ−ニング装置
JPS60145545U (ja) 試料ホルダ位置決め装置
JPS59169044U (ja) 半導体チツプ吸着用ノズル
JPS5811770U (ja) 結像素子クリ−ニング装置
JPS6077056U (ja) Ｅｐレコ−ド用アダプタ−
JPH07326889A (ja) パネル素子のキャリア
JP2004186261A5 (cs)
JPS595291U (ja) 板材搬出装置
KR19980055781A (ko) 반도체소자의 보관 및 운반방법 및 그 장치
JPS6246520A (ja) 露光装置