JPS6316590U - - Google Patents

Info

Publication number
JPS6316590U
JPS6316590U JP1986108729U JP10872986U JPS6316590U JP S6316590 U JPS6316590 U JP S6316590U JP 1986108729 U JP1986108729 U JP 1986108729U JP 10872986 U JP10872986 U JP 10872986U JP S6316590 U JPS6316590 U JP S6316590U
Authority
JP
Japan
Prior art keywords
flexible arm
arm
mirror
mirror block
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986108729U
Other languages
English (en)
Japanese (ja)
Other versions
JPH032394Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108729U priority Critical patent/JPH032394Y2/ja
Publication of JPS6316590U publication Critical patent/JPS6316590U/ja
Application granted granted Critical
Publication of JPH032394Y2 publication Critical patent/JPH032394Y2/ja
Expired legal-status Critical Current

Links

JP1986108729U 1986-07-17 1986-07-17 Expired JPH032394Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108729U JPH032394Y2 (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108729U JPH032394Y2 (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Publications (2)

Publication Number Publication Date
JPS6316590U true JPS6316590U (enrdf_load_stackoverflow) 1988-02-03
JPH032394Y2 JPH032394Y2 (enrdf_load_stackoverflow) 1991-01-23

Family

ID=30986193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108729U Expired JPH032394Y2 (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPH032394Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
JP4626451B2 (ja) * 2005-08-30 2011-02-09 株式会社デンソー 表示装置

Also Published As

Publication number Publication date
JPH032394Y2 (enrdf_load_stackoverflow) 1991-01-23

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