JPS6316590U - - Google Patents
Info
- Publication number
- JPS6316590U JPS6316590U JP1986108729U JP10872986U JPS6316590U JP S6316590 U JPS6316590 U JP S6316590U JP 1986108729 U JP1986108729 U JP 1986108729U JP 10872986 U JP10872986 U JP 10872986U JP S6316590 U JPS6316590 U JP S6316590U
- Authority
- JP
- Japan
- Prior art keywords
- flexible arm
- arm
- mirror
- mirror block
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986108729U JPH032394Y2 (OSRAM) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986108729U JPH032394Y2 (OSRAM) | 1986-07-17 | 1986-07-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316590U true JPS6316590U (OSRAM) | 1988-02-03 |
| JPH032394Y2 JPH032394Y2 (OSRAM) | 1991-01-23 |
Family
ID=30986193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986108729U Expired JPH032394Y2 (OSRAM) | 1986-07-17 | 1986-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032394Y2 (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7049226B2 (en) | 2001-09-26 | 2006-05-23 | Applied Materials, Inc. | Integration of ALD tantalum nitride for copper metallization |
| JP4626451B2 (ja) * | 2005-08-30 | 2011-02-09 | 株式会社デンソー | 表示装置 |
-
1986
- 1986-07-17 JP JP1986108729U patent/JPH032394Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH032394Y2 (OSRAM) | 1991-01-23 |