JPS6316439U - - Google Patents
Info
- Publication number
- JPS6316439U JPS6316439U JP11080486U JP11080486U JPS6316439U JP S6316439 U JPS6316439 U JP S6316439U JP 11080486 U JP11080486 U JP 11080486U JP 11080486 U JP11080486 U JP 11080486U JP S6316439 U JPS6316439 U JP S6316439U
- Authority
- JP
- Japan
- Prior art keywords
- tool
- thin film
- film deposited
- regions
- mechanical scribing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
第１図は既に実用化されている集積型太陽電池
の基本構造を示す断面図、第２図は本考案ツール
の第１実施例を説明するためのスクライブ工程の
斜視図、第３図は本考案ツールの第２実施例を説
明するためのスクライブ工程の斜視図、第４図は
本考案ツールの第３実施例を説明するためのスク
ライブ工程の斜視図、を夫々示している。
１…支持基板、３…非晶質半導体膜、１０…ツ
ール、１０１…先端部。
Fig. 1 is a cross-sectional view showing the basic structure of an integrated solar cell that has already been put into practical use, Fig. 2 is a perspective view of the scribing process to explain the first embodiment of the invented tool, and Fig. 3 is the book of this invention. FIG. 4 shows a perspective view of the scribing process for explaining the second embodiment of the invented tool, and FIG. 4 shows a perspective view of the scribing process for explaining the third embodiment of the invented tool. DESCRIPTION OF SYMBOLS 1... Support substrate, 3... Amorphous semiconductor film, 10... Tool, 101... Tip part.
Claims (1)
着された薄膜を各領域毎に分割すべく、上記領域
に被着された薄膜を機械的にスクライブして除去
するメカニカルスクライブ用ツールであつて、上
記ツール先端部のスクライブ方向に垂直な横幅は
実質的に不変であることを特徴としたメカニカル
スクライブ用ツール。 A mechanical scribing tool that mechanically scribes and removes a thin film deposited on a plurality of regions on the surface of a support substrate in order to divide the thin film deposited over multiple regions into each region. The mechanical scribing tool is characterized in that the width of the tip of the tool perpendicular to the scribing direction is substantially unchanged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11080486U JPS6316439U (en) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11080486U JPS6316439U (en) | 1986-07-18 | 1986-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316439U true JPS6316439U (en) | 1988-02-03 |
Family
ID=30990145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11080486U Pending JPS6316439U (en) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316439U (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009145058A1 (en) * | 2008-05-26 | 2009-12-03 | 三星ダイヤモンド工業株式会社 | Scribe apparatus for thin film solar cell |
| JP2010245124A (en) * | 2009-04-01 | 2010-10-28 | Mitsuboshi Diamond Industrial Co Ltd | Manufacturing unit for integrated thin-film solar cells |
| EP2343173A1 (en) | 2010-01-08 | 2011-07-13 | Mitsuboshi Diamond Industrial Co., Ltd. | Groove machining tool for use with a thin-film solar cell |
| EP2455173A2 (en) | 2010-11-18 | 2012-05-23 | Mitsuboshi Diamond Industrial Co., Ltd. | Defect repairing tool, defect repairing device and defect repairing method for thin-film solar cell |
| EP2469587A2 (en) | 2010-12-21 | 2012-06-27 | Mitsuboshi Diamond Industrial Co., Ltd. | Groove processing tool and groove processing device for thin-film solar cell |
| JP2012146948A (en) * | 2010-12-24 | 2012-08-02 | Mitsuboshi Diamond Industrial Co Ltd | Patterning device |
| JP2013042153A (en) * | 2009-02-24 | 2013-02-28 | Mitsuboshi Diamond Industrial Co Ltd | Groove processing method of integrated thin film solar cell |
| CN103029156A (en) * | 2011-09-28 | 2013-04-10 | 三星钻石工业股份有限公司 | Groove processing device for substrate |
| JP2014188599A (en) * | 2013-03-26 | 2014-10-06 | Mitsuboshi Diamond Industrial Co Ltd | Groove processing tool and groove processing apparatus using the same |
| JP2015195347A (en) * | 2014-03-28 | 2015-11-05 | 三星ダイヤモンド工業株式会社 | Groove processing tool and scribe apparatus with the groove processing tool |
-
1986
- 1986-07-18 JP JP11080486U patent/JPS6316439U/ja active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009145058A1 (en) * | 2008-05-26 | 2009-12-03 | 三星ダイヤモンド工業株式会社 | Scribe apparatus for thin film solar cell |
| JP2013042153A (en) * | 2009-02-24 | 2013-02-28 | Mitsuboshi Diamond Industrial Co Ltd | Groove processing method of integrated thin film solar cell |
| JP2013056414A (en) * | 2009-02-24 | 2013-03-28 | Mitsuboshi Diamond Industrial Co Ltd | Slotting tool and scribing device for thin film solar cell using the same |
| JP2013049131A (en) * | 2009-02-24 | 2013-03-14 | Mitsuboshi Diamond Industrial Co Ltd | Slotting tool, and scribing device for thin film solar cell using the same |
| JP2010245124A (en) * | 2009-04-01 | 2010-10-28 | Mitsuboshi Diamond Industrial Co Ltd | Manufacturing unit for integrated thin-film solar cells |
| EP2343173A1 (en) | 2010-01-08 | 2011-07-13 | Mitsuboshi Diamond Industrial Co., Ltd. | Groove machining tool for use with a thin-film solar cell |
| EP2455173A2 (en) | 2010-11-18 | 2012-05-23 | Mitsuboshi Diamond Industrial Co., Ltd. | Defect repairing tool, defect repairing device and defect repairing method for thin-film solar cell |
| EP2469587A2 (en) | 2010-12-21 | 2012-06-27 | Mitsuboshi Diamond Industrial Co., Ltd. | Groove processing tool and groove processing device for thin-film solar cell |
| JP2012146948A (en) * | 2010-12-24 | 2012-08-02 | Mitsuboshi Diamond Industrial Co Ltd | Patterning device |
| CN103029156A (en) * | 2011-09-28 | 2013-04-10 | 三星钻石工业股份有限公司 | Groove processing device for substrate |
| KR101312285B1 (en) * | 2011-09-28 | 2013-09-27 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Groove processing device for substrate |
| JP2014188599A (en) * | 2013-03-26 | 2014-10-06 | Mitsuboshi Diamond Industrial Co Ltd | Groove processing tool and groove processing apparatus using the same |
| TWI576322B (en) * | 2013-03-26 | 2017-04-01 | 三星鑽石工業股份有限公司 | Trench processing tools, and the use of its trench processing device |
| JP2015195347A (en) * | 2014-03-28 | 2015-11-05 | 三星ダイヤモンド工業株式会社 | Groove processing tool and scribe apparatus with the groove processing tool |
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