JPS63164194U - - Google Patents
Info
- Publication number
- JPS63164194U JPS63164194U JP5715187U JP5715187U JPS63164194U JP S63164194 U JPS63164194 U JP S63164194U JP 5715187 U JP5715187 U JP 5715187U JP 5715187 U JP5715187 U JP 5715187U JP S63164194 U JPS63164194 U JP S63164194U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- heating element
- section
- heating furnace
- shaped heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
Landscapes
- Furnace Details (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987057151U JPH0419753Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987057151U JPH0419753Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63164194U true JPS63164194U (enExample) | 1988-10-26 |
| JPH0419753Y2 JPH0419753Y2 (enExample) | 1992-05-06 |
Family
ID=30886595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987057151U Expired JPH0419753Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0419753Y2 (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5473578A (en) * | 1977-11-24 | 1979-06-12 | Toshiba Corp | Pattern exposure method of semiconductor substrate and pattern exposure apparatus |
| JPS5514791U (enExample) * | 1978-07-18 | 1980-01-30 | ||
| JPS5778790A (en) * | 1980-11-04 | 1982-05-17 | Mitsubishi Heavy Ind Ltd | Telescopic slide insulating and supporting device for electric heater |
| JPS5950439U (ja) * | 1982-09-27 | 1984-04-03 | キヤノン株式会社 | 半導体露光装置 |
-
1987
- 1987-04-15 JP JP1987057151U patent/JPH0419753Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5473578A (en) * | 1977-11-24 | 1979-06-12 | Toshiba Corp | Pattern exposure method of semiconductor substrate and pattern exposure apparatus |
| JPS5514791U (enExample) * | 1978-07-18 | 1980-01-30 | ||
| JPS5778790A (en) * | 1980-11-04 | 1982-05-17 | Mitsubishi Heavy Ind Ltd | Telescopic slide insulating and supporting device for electric heater |
| JPS5950439U (ja) * | 1982-09-27 | 1984-04-03 | キヤノン株式会社 | 半導体露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0419753Y2 (enExample) | 1992-05-06 |