JPS63164194U - - Google Patents

Info

Publication number
JPS63164194U
JPS63164194U JP5715187U JP5715187U JPS63164194U JP S63164194 U JPS63164194 U JP S63164194U JP 5715187 U JP5715187 U JP 5715187U JP 5715187 U JP5715187 U JP 5715187U JP S63164194 U JPS63164194 U JP S63164194U
Authority
JP
Japan
Prior art keywords
pipe
heating element
section
heating furnace
shaped heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5715187U
Other languages
Japanese (ja)
Other versions
JPH0419753Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987057151U priority Critical patent/JPH0419753Y2/ja
Publication of JPS63164194U publication Critical patent/JPS63164194U/ja
Application granted granted Critical
Publication of JPH0419753Y2 publication Critical patent/JPH0419753Y2/ja
Expired legal-status Critical Current

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  • Resistance Heating (AREA)
  • Furnace Details (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、この考案の実施例を示す縦断面図、
第２図は、第１図の―線断面図、第３図は第
１図の要所拡大図でパイプ状発熱体の断面図、第
４図、第５図は、他の実施例を示す断面図で第３
図に相当する図、第６図〜第１０図は、各々、更
に他の実施例を示す図である。 ２……支持リング、３……パイプ状発熱体。 FIG. 1 is a longitudinal sectional view showing an embodiment of this invention;
Fig. 2 is a sectional view taken along the line - - in Fig. 1, Fig. 3 is an enlarged view of important points in Fig. 1 and is a sectional view of the pipe-shaped heating element, and Figs. 4 and 5 show other embodiments. 3rd in cross section
The figures corresponding to the figure, FIGS. 6 to 10, each show still other embodiments. 2...Support ring, 3...Pipe-shaped heating element.

Claims (1)

【実用新案登録請求の範囲】 (1) パイプ状発熱体を備えたことを特徴とする
加熱炉のヒータ。 (2) パイプ状発熱体が、断面円筒状であること
を特徴とする実用新案登録請求の範囲第１項記載
の加熱炉のヒータ。 (3) パイプ状発熱体が、断面中空楕円状である
ことを特徴とする実用新案登録請求の範囲第１項
記載の加熱炉のヒータ。 (4) パイプ状発熱体が、断面中空方形状である
ことを特徴とする実用新案登録請求の範囲第１項
記載の加熱炉のヒータ。 (5) パイプ状発熱体が、支持リングにより保持
されていることを特徴とする実用新案登録請求の
範囲第１項記載の加熱炉のヒータ。 (6) パイプ状発熱体が、冷却流体を流通せしめ
ることを特徴とする実用新案登録請求の範囲第１
項記載の加熱炉のヒータ。 (7) パイプ状発熱体が、加熱流体を流通せしめ
ることを特徴とする実用新案登録請求の範囲第１
項記載の加熱炉のヒータ。[Scope of Claim for Utility Model Registration] (1) A heater for a heating furnace characterized by being equipped with a pipe-shaped heating element. (2) The heating furnace heater according to claim 1, wherein the pipe-shaped heating element has a cylindrical cross section. (3) The heating furnace heater according to claim 1, wherein the pipe-shaped heating element has a hollow elliptical cross section. (4) The heating furnace heater according to claim 1, wherein the pipe-shaped heating element has a hollow rectangular cross section. (5) The heating furnace heater according to claim 1, wherein the pipe-shaped heating element is held by a support ring. (6) Utility model registration claim 1, characterized in that the pipe-shaped heating element allows cooling fluid to flow through it.
Heater for the heating furnace described in section. (7) Utility model registration claim 1, characterized in that the pipe-shaped heating element allows heating fluid to flow through it.
Heater for the heating furnace described in section.
JP1987057151U 1987-04-15 1987-04-15 Expired JPH0419753Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987057151U JPH0419753Y2 (en) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987057151U JPH0419753Y2 (en) 1987-04-15 1987-04-15

Publications (2)

Publication Number Publication Date
JPS63164194U true JPS63164194U (en) 1988-10-26
JPH0419753Y2 JPH0419753Y2 (en) 1992-05-06

Family

ID=30886595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987057151U Expired JPH0419753Y2 (en) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPH0419753Y2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5514791U (en) * 1978-07-18 1980-01-30
JPS5778790A (en) * 1980-11-04 1982-05-17 Mitsubishi Heavy Ind Ltd Telescopic slide insulating and supporting device for electric heater
JPS5950439U (en) * 1982-09-27 1984-04-03 キヤノン株式会社 semiconductor exposure equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244940A (en) * 1975-10-07 1977-04-08 Mitsubishi Electric Corp Group control system of elevators
JPS5950439B2 (en) * 1975-12-27 1984-12-08 アイダエンジニアリング カブシキガイシヤ How to balance the power of balance

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5514791U (en) * 1978-07-18 1980-01-30
JPS5778790A (en) * 1980-11-04 1982-05-17 Mitsubishi Heavy Ind Ltd Telescopic slide insulating and supporting device for electric heater
JPS5950439U (en) * 1982-09-27 1984-04-03 キヤノン株式会社 semiconductor exposure equipment

Also Published As

Publication number Publication date
JPH0419753Y2 (en) 1992-05-06

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