JPS63162528U - - Google Patents
Info
- Publication number
- JPS63162528U JPS63162528U JP5514787U JP5514787U JPS63162528U JP S63162528 U JPS63162528 U JP S63162528U JP 5514787 U JP5514787 U JP 5514787U JP 5514787 U JP5514787 U JP 5514787U JP S63162528 U JPS63162528 U JP S63162528U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- liquid processing
- wafer
- supported
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987055147U JPH051075Y2 (en, 2012) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987055147U JPH051075Y2 (en, 2012) | 1987-04-10 | 1987-04-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63162528U true JPS63162528U (en, 2012) | 1988-10-24 |
| JPH051075Y2 JPH051075Y2 (en, 2012) | 1993-01-12 |
Family
ID=30882788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987055147U Expired - Lifetime JPH051075Y2 (en, 2012) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051075Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005005339A (ja) * | 2003-06-10 | 2005-01-06 | Tokyo Ohka Kogyo Co Ltd | 基板の現像装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887832A (ja) * | 1981-11-20 | 1983-05-25 | Toshiba Corp | 半導体処理装置 |
-
1987
- 1987-04-10 JP JP1987055147U patent/JPH051075Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5887832A (ja) * | 1981-11-20 | 1983-05-25 | Toshiba Corp | 半導体処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005005339A (ja) * | 2003-06-10 | 2005-01-06 | Tokyo Ohka Kogyo Co Ltd | 基板の現像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051075Y2 (en, 2012) | 1993-01-12 |