JPS63162527U - - Google Patents
Info
- Publication number
- JPS63162527U JPS63162527U JP5434387U JP5434387U JPS63162527U JP S63162527 U JPS63162527 U JP S63162527U JP 5434387 U JP5434387 U JP 5434387U JP 5434387 U JP5434387 U JP 5434387U JP S63162527 U JPS63162527 U JP S63162527U
- Authority
- JP
- Japan
- Prior art keywords
- pedestals
- semiconductor wafers
- connecting body
- jig
- handles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5434387U JPS63162527U (de) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5434387U JPS63162527U (de) | 1987-04-09 | 1987-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162527U true JPS63162527U (de) | 1988-10-24 |
Family
ID=30881249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5434387U Pending JPS63162527U (de) | 1987-04-09 | 1987-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162527U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179788A (ja) * | 1983-03-31 | 1984-10-12 | Fujitsu Ltd | ケミカルエッチング装置 |
-
1987
- 1987-04-09 JP JP5434387U patent/JPS63162527U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59179788A (ja) * | 1983-03-31 | 1984-10-12 | Fujitsu Ltd | ケミカルエッチング装置 |