JPS63162085A - Washing method - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a method for cleaning members that require high cleanliness.

(Prior art) As components such as electronic components and high-precision optical components with high density or fine patterns become more sophisticated,
Even the slightest bit of dust or pollution has a significant impact on its quality, and also poses a major hindrance to its production. Conventionally, methods for removing such dust and contamination include scrubbing with brushes and ultrasonic cleaning, but as parts become more sophisticated, there are many inconveniences, and cleaning itself may not be sufficient. are increasing.

For example, precisely finished optical components are contaminated with dust from the cutting oil used during processing, and various types of dust are also deposited during storage. Some of this dust is extremely fine, so even if it is ultrasonically cleaned using, for example, a fluorocarbon solvent, it is difficult to remove the extremely fine dust and it tends to leave stains after cleaning. ,after that,
It is necessary to use scrubbing with a brush etc. However, precisely finished optical components, especially when they are made of relatively soft materials such as plastic, may have their surfaces scratched or otherwise degraded, thereby deteriorating their quality.

(Problem to be solved by the invention) In the highly sophisticated parts mentioned above, the slightest minute dust or contamination has a serious effect on the quality of the parts, and also poses a major hindrance to their manufacture. very fine dust,
It cannot be removed by known ultrasonic cleaning methods, and it tends to cause stains, so it is necessary to scrub with a brush or the like afterwards, but if you clean with this method,
For example, there is a problem in that highly precisely finished parts may be damaged.

This invention was made to solve the above problems, and aims to provide a cleaning method that can remove even the most minute dust without causing scratches or stains on members.

[Structure of the Invention] (Means for Solving the Problems) A soft member having a lower hardness than the member to be cleaned is brought into close contact with the surface of the member to be cleaned, and the soft member is immersed in a cleaning liquid, and vibration or ultrasonic waves are applied to the surface of the member to be cleaned. After cleaning, the member to be cleaned was separated from the soft member without being exposed to the atmosphere, and was cleaned in a vapor atmosphere of the cleaning liquid.

(Function) As mentioned above, if a soft member with a lower hardness than the member to be cleaned is brought into close contact with the surface of the member to be cleaned and immersed in the cleaning liquid and subjected to rubbing motion or ultrasonic cleaning, the surface of the member to be cleaned will be It is possible to remove extremely fine dust that cannot be removed by normal scrubbing or ultrasonic cleaning without damaging the surface, and then it is separated from the soft parts without being exposed to the atmosphere and cleaned in the vapor atmosphere of the cleaning solution mentioned above. Then, the required cleaning can be performed without causing stains.

(Example) The present invention will be described below based on an example with reference to one drawing.

First, the cleaning device will be explained with reference to FIG.

This cleaning device has a cleaning tank (2) whose bottom side is divided into three by a partition wall (1), and the divided central and one side tanks are divided into a first tank and a second tank. They are called second solvent cleaning tanks (3a) and (3b), and the other tank is called a solvent vapor generation tank G). and.

An ultrasonic oscillator 0 is provided at the bottom of each of the first and 21a agent cleaning tanks (3a) and (3b), and a heater 0 is provided at the bottom of the solvent vapor generation tank 6). In addition, the above various types (3
A), (3b), and (a) are filled with a fluorocarbon solvent, and this fluorocarbon solvent is passed from the bottom of the first solvent cleaning tank (3a) through the pump (■) and the filter (8) to the second solvent cleaning. The solvent is supplied to the tank (3b), and from this second solvent cleaning tank (3b), it is overflowed to the first solvent cleaning tank (3a), and is also supplied to the solvent vapor generation tank (a) via a transport pipe (not shown). It looks like this. Furthermore, a cooler (9) is provided above the cleaning tank (3) to condense the fluorocarbon vapor generated from the various types (3a), (3b), and (a).

The cleaning of the components is carried out by, for example, using a support (11) supported by a tank transfer device made of rubber, plastic, a thin plate thereof with a particularly small foam diameter, or a fibrous material, as shown in FIG. 1(A). A soft member (12) made of a material with lower hardness than the member to be cleaned (W), such as a sheet, is attached, and a surface that requires a particularly high level of cleaning is brought into close contact with the soft member (12), and the first solvent cleaning tank is opened. (3a) Immerse in the fluorocarbon solvent and perform ultrasonic cleaning. In this case, in order to prevent the member to be cleaned (W) and the soft member (12) from floating and falling off, a frame-shaped support (11) may be used, for example, as shown in the drawings. In addition, in order to perform this ultrasonic cleaning more effectively, after cleaning in the first solvent cleaning tank (3a), transfer the tank to the second solvent cleaning tank (3b) and perform ultrasonic cleaning in the same way. I can do it. Also, instead of this ultrasonic cleaning,
It is also possible to perform cleaning by moving the support (11) as desired.

Next, the member to be cleaned (W) is moved into an atmosphere of fluorocarbon vapor filled in the cleaning tank (1) without being exposed to the atmosphere, and the soft member (12 ) with the contact surface (13) facing upward, and the soft member (12)
Remove and steam clean. Thereafter, the desired member is obtained by taking it out into a clean atmosphere and drying it.

In this cleaning method, a cellulose sponge plate with a micro-foamed diameter is brought into close contact with the surface to be cleaned of a 51 m thick glass substrate used in the manufacture of electronic components, and after being ultrasonically cleaned in a fluorocarbon solvent for 1 minute, the steam atmosphere When the cleaning surface was washed for 1 minute, the cleanliness of the surface to be cleaned was far superior to that obtained by conventional cleaning methods, and the wettability of the surface was significantly better.

In addition, when similar cleaning was performed on metal optical components with ultra-precision mirror-finished reflective surfaces, a much cleaner reflective surface was obtained compared to conventional methods. The angle measurements also showed smaller values than with conventional cleaning methods.

Furthermore, when a thin film was formed on the reflective surface and its adhesion strength and number of pinholes were evaluated, better results were obtained than with conventional cleaning methods.

In the above embodiment, ultrasonic waves are applied to the member to be cleaned from the bottom of the tank, but the ultrasonic waves may be applied from a support.

〔Effect of the invention〕

A soft member with a lower hardness than the member to be cleaned is brought into close contact with the surface of the member to be cleaned, immersed in the cleaning liquid, and cleaned by shaking or applying ultrasonic waves.Then, the member to be cleaned is exposed to the atmosphere. When separated from the soft member without being exposed and washed in the vapor atmosphere of the cleaning liquid, the scrubbing action of the soft member allows even the most minute dust to be removed without damaging the surface to be cleaned. Furthermore, by steam cleaning the soft member separately without exposing it to the atmosphere, it is possible to perform excellent cleaning with an extremely high degree of cleanliness without causing stains.

[Brief explanation of the drawing]

FIGS. 1A and 1B are process diagrams for explaining a cleaning method according to an embodiment of the present invention, and FIG. 2 is a diagram showing the configuration of the cleaning apparatus. (3a)...First solvent cleaning tank (3b)...Second solvent cleaning tank O)...Solvent vapor generation WI (c)...
・Ultrasonic oscillator 0...heater (11)・
・・Support (12)・・Soft member (13)・
・・Surface to be cleaned (W) ・・Object to be cleaned

Claims (2)

[Claims] (1) A step in which a soft member having a lower hardness than the member to be cleaned is brought into close contact with the surface of the member to be cleaned and immersed in a cleaning solution, and the cleaning is performed by applying at least rocking or ultrasonic waves; A cleaning method comprising the step of separating the member to be cleaned, which has been immersed and cleaned, from the soft member without exposing it to the atmosphere, and cleaning the member in a vapor atmosphere of the cleaning liquid. (2) The cleaning method according to claim 1, characterized in that the member to be cleaned and the soft member are separated from each other in a vapor atmosphere of a cleaning liquid.