JPS63160557U - - Google Patents

Info

Publication number
JPS63160557U
JPS63160557U JP1987052851U JP5285187U JPS63160557U JP S63160557 U JPS63160557 U JP S63160557U JP 1987052851 U JP1987052851 U JP 1987052851U JP 5285187 U JP5285187 U JP 5285187U JP S63160557 U JPS63160557 U JP S63160557U
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JP
Japan
Prior art keywords
pattern
pattern data
alignment mark
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mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987052851U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987052851U priority Critical patent/JPS63160557U/ja
Publication of JPS63160557U publication Critical patent/JPS63160557U/ja
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP1987052851U 1987-04-08 1987-04-08 Pending JPS63160557U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052851U JPS63160557U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052851U JPS63160557U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Publications (1)

Publication Number Publication Date
JPS63160557U true JPS63160557U (enrdf_load_stackoverflow) 1988-10-20

Family

ID=30878393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052851U Pending JPS63160557U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Country Status (1)

Country Link
JP (1) JPS63160557U (enrdf_load_stackoverflow)

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