JPS63159840U - - Google Patents

Info

Publication number

JPS63159840U

JPS63159840U JP5361487U JP5361487U JPS63159840U JP S63159840 U JPS63159840 U JP S63159840U JP 5361487 U JP5361487 U JP 5361487U JP 5361487 U JP5361487 U JP 5361487U JP S63159840 U JPS63159840 U JP S63159840U

Authority

JP

Japan

Prior art keywords

integrated circuit

semiconductor integrated

circuit device

impurity diffusion

diffusion layer

Prior art date

1987-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 238000009792 diffusion process Methods 0.000 claims 4
• 239000012535 impurity Substances 0.000 claims 4
• 230000003071 parasitic effect Effects 0.000 description 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000005611 electricity Effects 0.000 description 1
• 238000002955 isolation Methods 0.000 description 1
• 230000003068 static effect Effects 0.000 description 1