JPS63159706U - - Google Patents
Info
- Publication number
- JPS63159706U JPS63159706U JP5286987U JP5286987U JPS63159706U JP S63159706 U JPS63159706 U JP S63159706U JP 5286987 U JP5286987 U JP 5286987U JP 5286987 U JP5286987 U JP 5286987U JP S63159706 U JPS63159706 U JP S63159706U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- interference fringes
- optical system
- optical fiber
- laser interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- 239000000835 fiber Substances 0.000 claims 2
- 230000010287 polarization Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987052869U JP2517929Y2 (ja) | 1987-04-08 | 1987-04-08 | 分離型レ−ザ干渉計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987052869U JP2517929Y2 (ja) | 1987-04-08 | 1987-04-08 | 分離型レ−ザ干渉計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63159706U true JPS63159706U (bg) | 1988-10-19 |
JP2517929Y2 JP2517929Y2 (ja) | 1996-11-20 |
Family
ID=30878429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987052869U Expired - Lifetime JP2517929Y2 (ja) | 1987-04-08 | 1987-04-08 | 分離型レ−ザ干渉計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2517929Y2 (bg) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11213932A (ja) * | 1998-01-23 | 1999-08-06 | Jeol Ltd | 荷電粒子ビーム装置における試料装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5224811B2 (ja) * | 2005-08-16 | 2013-07-03 | 株式会社東京精密 | レーザ測長器 |
JP6285661B2 (ja) * | 2013-08-09 | 2018-02-28 | キヤノン株式会社 | 干渉計測装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6018727A (ja) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | 光干渉計 |
JPS60176109U (ja) * | 1984-04-28 | 1985-11-21 | 鈴木 範人 | 干渉縞の移動方向判定装置 |
JPS61219803A (ja) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | 物理量測定装置 |
-
1987
- 1987-04-08 JP JP1987052869U patent/JP2517929Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6018727A (ja) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | 光干渉計 |
JPS60176109U (ja) * | 1984-04-28 | 1985-11-21 | 鈴木 範人 | 干渉縞の移動方向判定装置 |
JPS61219803A (ja) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | 物理量測定装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11213932A (ja) * | 1998-01-23 | 1999-08-06 | Jeol Ltd | 荷電粒子ビーム装置における試料装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2517929Y2 (ja) | 1996-11-20 |
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