JPS63157956U - - Google Patents
Info
- Publication number
- JPS63157956U JPS63157956U JP5247687U JP5247687U JPS63157956U JP S63157956 U JPS63157956 U JP S63157956U JP 5247687 U JP5247687 U JP 5247687U JP 5247687 U JP5247687 U JP 5247687U JP S63157956 U JPS63157956 U JP S63157956U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- insulating film
- conductive material
- diffusion layer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247687U JPS63157956U ( ) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5247687U JPS63157956U ( ) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157956U true JPS63157956U ( ) | 1988-10-17 |
Family
ID=30877677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5247687U Pending JPS63157956U ( ) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157956U ( ) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60225462A (ja) * | 1984-04-24 | 1985-11-09 | Oki Electric Ind Co Ltd | 半導体メモリ素子 |
| JPS6136965A (ja) * | 1984-07-30 | 1986-02-21 | Toshiba Corp | 半導体メモリ装置 |
-
1987
- 1987-04-06 JP JP5247687U patent/JPS63157956U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60225462A (ja) * | 1984-04-24 | 1985-11-09 | Oki Electric Ind Co Ltd | 半導体メモリ素子 |
| JPS6136965A (ja) * | 1984-07-30 | 1986-02-21 | Toshiba Corp | 半導体メモリ装置 |