JPS63157239U - - Google Patents

Info

Publication number
JPS63157239U
JPS63157239U JP4857387U JP4857387U JPS63157239U JP S63157239 U JPS63157239 U JP S63157239U JP 4857387 U JP4857387 U JP 4857387U JP 4857387 U JP4857387 U JP 4857387U JP S63157239 U JPS63157239 U JP S63157239U
Authority
JP
Japan
Prior art keywords
plasma
mounting table
projection hole
extraction window
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4857387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4857387U priority Critical patent/JPS63157239U/ja
Publication of JPS63157239U publication Critical patent/JPS63157239U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP4857387U 1987-03-30 1987-03-30 Pending JPS63157239U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4857387U JPS63157239U (enrdf_load_html_response) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4857387U JPS63157239U (enrdf_load_html_response) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63157239U true JPS63157239U (enrdf_load_html_response) 1988-10-14

Family

ID=30870229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4857387U Pending JPS63157239U (enrdf_load_html_response) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63157239U (enrdf_load_html_response)

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