JPS63157158U - - Google Patents
Info
- Publication number
- JPS63157158U JPS63157158U JP4984187U JP4984187U JPS63157158U JP S63157158 U JPS63157158 U JP S63157158U JP 4984187 U JP4984187 U JP 4984187U JP 4984187 U JP4984187 U JP 4984187U JP S63157158 U JPS63157158 U JP S63157158U
- Authority
- JP
- Japan
- Prior art keywords
- secondary ion
- electrode
- axis electrode
- mass spectrometer
- ion mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 150000002500 ions Chemical group 0.000 claims 5
- 238000004140 cleaning Methods 0.000 claims 1
- 238000011109 contamination Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4984187U JPS63157158U (no) | 1987-04-03 | 1987-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4984187U JPS63157158U (no) | 1987-04-03 | 1987-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157158U true JPS63157158U (no) | 1988-10-14 |
Family
ID=30872667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4984187U Pending JPS63157158U (no) | 1987-04-03 | 1987-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157158U (no) |
-
1987
- 1987-04-03 JP JP4984187U patent/JPS63157158U/ja active Pending