JPH0425148U - - Google Patents

Info

Publication number
JPH0425148U
JPH0425148U JP6777490U JP6777490U JPH0425148U JP H0425148 U JPH0425148 U JP H0425148U JP 6777490 U JP6777490 U JP 6777490U JP 6777490 U JP6777490 U JP 6777490U JP H0425148 U JPH0425148 U JP H0425148U
Authority
JP
Japan
Prior art keywords
ion beam
focusing
focusing mechanism
focusing electrode
force received
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6777490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6777490U priority Critical patent/JPH0425148U/ja
Publication of JPH0425148U publication Critical patent/JPH0425148U/ja
Pending legal-status Critical Current

Links

JP6777490U 1990-06-25 1990-06-25 Pending JPH0425148U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6777490U JPH0425148U (no) 1990-06-25 1990-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6777490U JPH0425148U (no) 1990-06-25 1990-06-25

Publications (1)

Publication Number Publication Date
JPH0425148U true JPH0425148U (no) 1992-02-28

Family

ID=31601650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6777490U Pending JPH0425148U (no) 1990-06-25 1990-06-25

Country Status (1)

Country Link
JP (1) JPH0425148U (no)

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