JPS63157054U - - Google Patents

Info

Publication number
JPS63157054U
JPS63157054U JP4928887U JP4928887U JPS63157054U JP S63157054 U JPS63157054 U JP S63157054U JP 4928887 U JP4928887 U JP 4928887U JP 4928887 U JP4928887 U JP 4928887U JP S63157054 U JPS63157054 U JP S63157054U
Authority
JP
Japan
Prior art keywords
semiconductor
manufacturing equipment
substrate
belt
backside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4928887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4928887U priority Critical patent/JPS63157054U/ja
Publication of JPS63157054U publication Critical patent/JPS63157054U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP4928887U 1987-03-31 1987-03-31 Pending JPS63157054U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4928887U JPS63157054U (US20030220297A1-20031127-C00074.png) 1987-03-31 1987-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4928887U JPS63157054U (US20030220297A1-20031127-C00074.png) 1987-03-31 1987-03-31

Publications (1)

Publication Number Publication Date
JPS63157054U true JPS63157054U (US20030220297A1-20031127-C00074.png) 1988-10-14

Family

ID=30871596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4928887U Pending JPS63157054U (US20030220297A1-20031127-C00074.png) 1987-03-31 1987-03-31

Country Status (1)

Country Link
JP (1) JPS63157054U (US20030220297A1-20031127-C00074.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026224A (ja) * 2007-07-23 2009-02-05 Canon Machinery Inc カード搬送装置
WO2018124632A1 (ko) * 2016-12-26 2018-07-05 주식회사 한화 광기전력 소자 제조 장치 및 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200551A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd ウエハ搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200551A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd ウエハ搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026224A (ja) * 2007-07-23 2009-02-05 Canon Machinery Inc カード搬送装置
WO2018124632A1 (ko) * 2016-12-26 2018-07-05 주식회사 한화 광기전력 소자 제조 장치 및 제조 방법

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