JPS63156479U - - Google Patents
Info
- Publication number
- JPS63156479U JPS63156479U JP4943987U JP4943987U JPS63156479U JP S63156479 U JPS63156479 U JP S63156479U JP 4943987 U JP4943987 U JP 4943987U JP 4943987 U JP4943987 U JP 4943987U JP S63156479 U JPS63156479 U JP S63156479U
- Authority
- JP
- Japan
- Prior art keywords
- container
- cryopump
- detects
- detection result
- pressure detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4943987U JPS63156479U (nl) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4943987U JPS63156479U (nl) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63156479U true JPS63156479U (nl) | 1988-10-13 |
Family
ID=30871893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4943987U Pending JPS63156479U (nl) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63156479U (nl) |
-
1987
- 1987-03-31 JP JP4943987U patent/JPS63156479U/ja active Pending
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