JPS63155997U - - Google Patents

Info

Publication number
JPS63155997U
JPS63155997U JP4724287U JP4724287U JPS63155997U JP S63155997 U JPS63155997 U JP S63155997U JP 4724287 U JP4724287 U JP 4724287U JP 4724287 U JP4724287 U JP 4724287U JP S63155997 U JPS63155997 U JP S63155997U
Authority
JP
Japan
Prior art keywords
support tube
detection device
displacement
temperature detection
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4724287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4724287U priority Critical patent/JPH058476Y2/ja
Publication of JPS63155997U publication Critical patent/JPS63155997U/ja
Application granted granted Critical
Publication of JPH058476Y2 publication Critical patent/JPH058476Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B30B11/002Isostatic press chambers; Press stands therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Powder Metallurgy (AREA)
JP4724287U 1987-03-30 1987-03-30 Expired - Lifetime JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-30 1987-03-30

Publications (2)

Publication Number Publication Date
JPS63155997U true JPS63155997U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-13
JPH058476Y2 JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-03

Family

ID=30867663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4724287U Expired - Lifetime JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure

Also Published As

Publication number Publication date
JPH058476Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-03

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