JPS63155106U - - Google Patents
Info
- Publication number
- JPS63155106U JPS63155106U JP4839287U JP4839287U JPS63155106U JP S63155106 U JPS63155106 U JP S63155106U JP 4839287 U JP4839287 U JP 4839287U JP 4839287 U JP4839287 U JP 4839287U JP S63155106 U JPS63155106 U JP S63155106U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- optical fiber
- silicon substrate
- silicon
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
Description
第1図はこの考案の一実施例の模式的な斜視図
、第2図は位置関係を説明するための正面図、第
3図A,B,Cは接合の手順を示す正面図である
。
1…シリコン基板、2…V溝、3…光導波路基
板、4…光導波路領域、5…光フアイバ、51…
コア部、52…クラツド部、6…直流電源。
FIG. 1 is a schematic perspective view of an embodiment of this invention, FIG. 2 is a front view for explaining the positional relationship, and FIGS. 3A, B, and C are front views showing the joining procedure. DESCRIPTION OF SYMBOLS 1... Silicon substrate, 2... V groove, 3... Optical waveguide substrate, 4... Optical waveguide region, 5... Optical fiber, 51...
Core part, 52... Clad part, 6... DC power supply.
Claims (1)
形成されたシリコン基板と、該シリコン基板のV
溝が形成された面に、電界印加熱接合により接合
された、シリコンに近い熱膨張率のガラスよりな
る光導波路基板とを有してなる光フアイバ接続装
置。 A silicon substrate in which a V groove for placing and positioning an optical fiber is formed, and a V groove in the silicon substrate.
An optical fiber connection device comprising an optical waveguide substrate made of glass having a coefficient of thermal expansion close to that of silicon and bonded to a surface in which a groove is formed by electric field application heat bonding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4839287U JPS63155106U (en) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4839287U JPS63155106U (en) | 1987-03-31 | 1987-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63155106U true JPS63155106U (en) | 1988-10-12 |
Family
ID=30869877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4839287U Pending JPS63155106U (en) | 1987-03-31 | 1987-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63155106U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63311213A (en) * | 1987-06-12 | 1988-12-20 | Sumitomo Electric Ind Ltd | Optical waveguide device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119314A (en) * | 1981-01-16 | 1982-07-24 | Omron Tateisi Electronics Co | Connecting method between optical fiber and optical waveguide |
JPS60260136A (en) * | 1984-06-06 | 1985-12-23 | Nec Corp | Electrostatic bonding method |
-
1987
- 1987-03-31 JP JP4839287U patent/JPS63155106U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119314A (en) * | 1981-01-16 | 1982-07-24 | Omron Tateisi Electronics Co | Connecting method between optical fiber and optical waveguide |
JPS60260136A (en) * | 1984-06-06 | 1985-12-23 | Nec Corp | Electrostatic bonding method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63311213A (en) * | 1987-06-12 | 1988-12-20 | Sumitomo Electric Ind Ltd | Optical waveguide device |
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