JPS6315438U - - Google Patents

Info

Publication number
JPS6315438U
JPS6315438U JP10855886U JP10855886U JPS6315438U JP S6315438 U JPS6315438 U JP S6315438U JP 10855886 U JP10855886 U JP 10855886U JP 10855886 U JP10855886 U JP 10855886U JP S6315438 U JPS6315438 U JP S6315438U
Authority
JP
Japan
Prior art keywords
air blowing
membrane
slit
clean room
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10855886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413552Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986108558U priority Critical patent/JPH0413552Y2/ja
Publication of JPS6315438U publication Critical patent/JPS6315438U/ja
Application granted granted Critical
Publication of JPH0413552Y2 publication Critical patent/JPH0413552Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Air-Flow Control Members (AREA)
  • Ventilation (AREA)
JP1986108558U 1986-07-15 1986-07-15 Expired JPH0413552Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986108558U JPH0413552Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986108558U JPH0413552Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Publications (2)

Publication Number Publication Date
JPS6315438U true JPS6315438U (enrdf_load_stackoverflow) 1988-02-01
JPH0413552Y2 JPH0413552Y2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=30985861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986108558U Expired JPH0413552Y2 (enrdf_load_stackoverflow) 1986-07-15 1986-07-15

Country Status (1)

Country Link
JP (1) JPH0413552Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021167722A (ja) * 2021-07-15 2021-10-21 株式会社西部技研 クリーンブース

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61265433A (ja) * 1985-05-20 1986-11-25 チヤ−ルズ　ダブリユ−　ソルテイス 空気濾過分配構造

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61265433A (ja) * 1985-05-20 1986-11-25 チヤ−ルズ　ダブリユ−　ソルテイス 空気濾過分配構造

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021167722A (ja) * 2021-07-15 2021-10-21 株式会社西部技研 クリーンブース

Also Published As

Publication number Publication date
JPH0413552Y2 (enrdf_load_stackoverflow) 1992-03-30

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