JPS63154081A - Light-transmitting electrostatic attraction plate - Google Patents
Light-transmitting electrostatic attraction plateInfo
- Publication number
- JPS63154081A JPS63154081A JP29853886A JP29853886A JPS63154081A JP S63154081 A JPS63154081 A JP S63154081A JP 29853886 A JP29853886 A JP 29853886A JP 29853886 A JP29853886 A JP 29853886A JP S63154081 A JPS63154081 A JP S63154081A
- Authority
- JP
- Japan
- Prior art keywords
- light
- electrode
- electrodes
- layer
- transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002834 transmittance Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 5
- 238000001179 sorption measurement Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 abstract description 18
- 239000011241 protective layer Substances 0.000 abstract description 5
- 229920005992 thermoplastic resin Polymers 0.000 abstract description 4
- 239000012780 transparent material Substances 0.000 abstract description 4
- 239000004020 conductor Substances 0.000 abstract description 3
- 238000007493 shaping process Methods 0.000 abstract 2
- 238000007689 inspection Methods 0.000 abstract 1
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000001034 iron oxide pigment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光透過性静電吸着板に関し、更に詳細には、
絶縁基板上に複数個の電極を配置し、その上に誘電体層
を設けてなる静電吸着板に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a light-transmitting electrostatic adsorption plate, and more specifically,
The present invention relates to an electrostatic adsorption plate in which a plurality of electrodes are arranged on an insulating substrate and a dielectric layer is provided thereon.
従来から光透過性静電吸着板は知られており、この吸着
板には、当然のことながら光透過性の材料で形成された
電極が使用されている。Light-transparent electrostatic adsorption plates have been known for a long time, and as a matter of course, electrodes made of a light-transparent material are used in these adsorption plates.
しかしながら、電極として、完全に無色で透過率１００
％のものは得られないので、電極部分が、その構成材料
の透過率の分だけ光透過性が低下し、均一な明るさが得
られない。このため、透過性による写真の撮影やネガフ
ィルムなどの検査をする場合問題となる。However, as an electrode, it is completely colorless and has a transmittance of 100.
%, the light transmittance of the electrode portion decreases by the transmittance of its constituent material, making it impossible to obtain uniform brightness. This poses a problem when photographing or inspecting negative film using transparency.
そこで本発明は、全面にわたってほぼ均一な光透過性を
もつ光ｉ過性静電吸着板を提供することを目的とするも
のである。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a light-transmissive electrostatic adsorption plate having substantially uniform light transmittance over the entire surface.
本発明は、絶縁基板の上に複数個の電極を配置し、その
上に誘電体層を設けてなる光透過性静電吸着板において
、前記電極を光透過性材料で形成するとともに、電極以
外の部分の光透過度が前記電極部分とほぼ等しくなるよ
うに、電気絶縁性の透過度調整層を設けたことを特徴と
するものである。The present invention provides a light-transparent electrostatic adsorption plate in which a plurality of electrodes are arranged on an insulating substrate and a dielectric layer is provided thereon, in which the electrodes are formed of a light-transparent material, and other than the electrodes. The device is characterized in that an electrically insulating transmittance adjustment layer is provided so that the light transmittance of the portion is approximately equal to that of the electrode portion.
本発明の光？ｉ適性静電吸着板においては、電極を構成
した材料の光透過性に合わせて、電極以外の部分を電気
絶縁性で電極部分と同一光透過率のインクによる印刷も
しくはフィルムにより形成される透過度調整層を設けて
、吸着板全面をほぼ均一な光透過度としたので、はぼ均
一な強さの透過光が得られ、写真の撮影やネガフィルム
などの検査を良好に行なうことができる。The light of the invention? i For suitable electrostatic adsorption plates, the parts other than the electrodes should be electrically insulating and printed with ink or film with the same light transmittance as the electrode parts, depending on the light transmittance of the material that made up the electrodes. Since the adjustment layer is provided to make the entire surface of the suction plate substantially uniform in light transmittance, transmitted light with a nearly uniform intensity can be obtained, making it possible to take photographs and inspect negative films, etc.
以下、添付図面を参照しつつ本発明の好ましい実施例に
よる光透過性静電吸着板について説明する。Hereinafter, a light-transmitting electrostatic adsorption plate according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.
第１図は、本発明の実施例による光透過性静電吸着板の
断面図、第２図は、第１図の線Ａ−Ａに沿う断面図であ
る。FIG. 1 is a sectional view of a light-transmissive electrostatic adsorption plate according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A--A in FIG. 1.
図において符号１は光透過性静電吸着板を示し、この静
電吸着板１は１枚の板状をなし、導電性材料で作られた
一対の櫛歯状電極２および３が互いに噛み合うように熱
可塑性樹脂絶縁支持層４上に配置され、その上を熱可塑
性樹脂絶縁保護層５で保護してなるものである。In the figure, reference numeral 1 indicates a light-transmitting electrostatic adsorption plate, and this electrostatic adsorption plate 1 has a plate shape, and a pair of comb-shaped electrodes 2 and 3 made of a conductive material are meshed with each other. It is arranged on a thermoplastic resin insulating support layer 4, and is protected by a thermoplastic resin insulating protective layer 5.
上記電極２および３、支持層４および保護層５は、いず
れも透明材料で形成されて、静電吸着板ｌを光透過性と
している。なお、上記材料はいずれも公知のものである
ので、その詳細な説明は省略する。The electrodes 2 and 3, the support layer 4, and the protective layer 5 are all made of transparent materials, making the electrostatic adsorption plate 1 light-transmissive. Note that since all of the above materials are known, detailed explanation thereof will be omitted.
ところが、上記構成であると、上記電極２．３０部分の
光透過度が他の部分と異なり、種々の支障をきたす。However, with the above configuration, the light transmittance of the electrode 2.30 portion is different from that of other portions, causing various problems.
そこで本発明においては、上記絶縁支持層４の電極２を
施した残りの部分に、上記電極２と同じ光透過度の透過
度調整層６を設け、静電吸着板１の全体にわたって均一
な光透過度となるようにしている。Therefore, in the present invention, a transmittance adjustment layer 6 having the same light transmittance as the electrode 2 is provided on the remaining portion of the insulating support layer 4 on which the electrode 2 is applied, so that uniform light is transmitted over the entire electrostatic adsorption plate 1. It is made to have transparency.
上記吸着板ｌを製造するにあたっては、まず上記透過度
調整層６を形成するための電気絶縁性のインクを調整し
た。具体的には、電極２．３を、例えば、酸化インジウ
ム粉末を導電材とした透明導電インクで形成した場合、
５μの膜厚の光透過率は８５％であるが、このインクの
色調、および光透過率に合わせて、カーボンブラックと
透明酸化鉄顔料を添加し電気絶縁性のインクを調製した
。In manufacturing the suction plate 1, an electrically insulating ink for forming the permeability adjustment layer 6 was first prepared. Specifically, when the electrode 2.3 is formed of, for example, a transparent conductive ink using indium oxide powder as a conductive material,
The light transmittance of a film with a thickness of 5 μm is 85%, but an electrically insulating ink was prepared by adding carbon black and a transparent iron oxide pigment to suit the color tone and light transmittance of this ink.
スクリーン印刷により前記透明導電インクを用い電極を
印刷した後、電極印刷用製版ネガを反転させて製版した
余白部分のスクリーン印刷版を用い前記の色調および光
透過性を合わせたインクで電極部分と重ならないように
余白部分に印刷をおこなった。After printing electrodes using the above-mentioned transparent conductive ink by screen printing, invert the electrode printing plate-making negative and use a screen printing plate in the margin area to overlap the electrode part with ink having the above-mentioned color tone and light transmittance. I printed in the margins to avoid this.
このようにして作った印刷層の上に光透過性の表面誘電
層を重ね、加熱圧着して静電吸着板をつくった。このも
のは均一な光透過性となり電極部分の目立たないもので
あった。A light-transmissive surface dielectric layer was layered on the printed layer thus prepared and bonded under heat and pressure to produce an electrostatic adsorption plate. This product had uniform light transmittance and the electrode portion was inconspicuous.
第１図は、本発明の実施例による光透過性静電吸着板の
断面図、
第２図は、第１図の線Ａ−Ａに沿う断面図である。
１・・・・・・光透過性静電吸着板
２．３・・・・・・電極
４・・・・・・絶縁支持層
５・・・・・・絶縁保護層
６・・・・・・透過度調整層FIG. 1 is a sectional view of a light-transmissive electrostatic adsorption plate according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A-A in FIG. 1. 1...Light-transparent electrostatic adsorption plate 2.3...Electrode 4...Insulating support layer 5...Insulating protective layer 6...・Transparency adjustment layer
Claims (1)
層を設けてなる静電吸着板において、前記電極を光透過
性材料で形成するとともに、電極以外の部分の光透過度
が前記電極部分とほぼ等しくなるように、該部分に電気
絶縁性の透過度調整層を設けたことを特徴とする光透過
性静電吸着板。In an electrostatic adsorption plate in which a plurality of electrodes are arranged on an insulating substrate and a dielectric layer is provided thereon, the electrodes are formed of a light-transmitting material, and the light transmittance of parts other than the electrodes is low. A light-transmissive electrostatic adsorption plate characterized in that an electrically insulating transmittance adjustment layer is provided on the electrode portion so as to be substantially equal to the electrode portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61298538A JP2518628B2 (en) | 1986-12-15 | 1986-12-15 | Light-transmissive electrostatic attraction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61298538A JP2518628B2 (en) | 1986-12-15 | 1986-12-15 | Light-transmissive electrostatic attraction plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63154081A true JPS63154081A (en) | 1988-06-27 |
| JP2518628B2 JP2518628B2 (en) | 1996-07-24 |
Family
ID=17861024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61298538A Expired - Lifetime JP2518628B2 (en) | 1986-12-15 | 1986-12-15 | Light-transmissive electrostatic attraction plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2518628B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285579A (en) * | 1990-03-30 | 1991-12-16 | Abisare:Kk | Transparent electrostatic attraction sheet |
| CN104720199A (en) * | 2013-12-20 | 2015-06-24 | 耐克创新有限合伙公司 | Pick-up tool with integrated light source |
| JP2018182047A (en) * | 2017-04-12 | 2018-11-15 | 株式会社ディスコ | Frame unit and laser processing method of workpiece |
-
1986
- 1986-12-15 JP JP61298538A patent/JP2518628B2/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285579A (en) * | 1990-03-30 | 1991-12-16 | Abisare:Kk | Transparent electrostatic attraction sheet |
| CN104720199A (en) * | 2013-12-20 | 2015-06-24 | 耐克创新有限合伙公司 | Pick-up tool with integrated light source |
| WO2015095559A1 (en) * | 2013-12-20 | 2015-06-25 | Nike Innovate C.V. | Pick-up tool with integrated light source |
| US9523570B2 (en) | 2013-12-20 | 2016-12-20 | Nike, Inc. | Pick-up tool with integrated light source |
| US9902074B2 (en) | 2013-12-20 | 2018-02-27 | Nike, Inc. | Pick-up tool with integrated light source |
| CN104720199B (en) * | 2013-12-20 | 2019-07-05 | 耐克创新有限合伙公司 | Pick tool with integrated light source |
| CN110226808A (en) * | 2013-12-20 | 2019-09-13 | 耐克创新有限合伙公司 | Pick tool with integrated light source |
| CN113826995A (en) * | 2013-12-20 | 2021-12-24 | 耐克创新有限合伙公司 | Pick-up tool with integrated light source |
| CN113826995B (en) * | 2013-12-20 | 2023-08-18 | 耐克创新有限合伙公司 | Pick-up tool with integrated light source |
| JP2018182047A (en) * | 2017-04-12 | 2018-11-15 | 株式会社ディスコ | Frame unit and laser processing method of workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2518628B2 (en) | 1996-07-24 |
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Legal Events
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