JPS63153529U - - Google Patents

Info

Publication number
JPS63153529U
JPS63153529U JP4729187U JP4729187U JPS63153529U JP S63153529 U JPS63153529 U JP S63153529U JP 4729187 U JP4729187 U JP 4729187U JP 4729187 U JP4729187 U JP 4729187U JP S63153529 U JPS63153529 U JP S63153529U
Authority
JP
Japan
Prior art keywords
wafer
vacuum
cleaning
drying
vacuum hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4729187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069492Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987047291U priority Critical patent/JPH069492Y2/ja
Publication of JPS63153529U publication Critical patent/JPS63153529U/ja
Application granted granted Critical
Publication of JPH069492Y2 publication Critical patent/JPH069492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1987047291U 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置 Expired - Lifetime JPH069492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987047291U JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987047291U JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS63153529U true JPS63153529U (ko) 1988-10-07
JPH069492Y2 JPH069492Y2 (ja) 1994-03-09

Family

ID=30867759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987047291U Expired - Lifetime JPH069492Y2 (ja) 1987-03-30 1987-03-30 ウエハ洗浄乾燥装置

Country Status (1)

Country Link
JP (1) JPH069492Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156416A (ja) * 2011-01-28 2012-08-16 Lintec Corp 支持装置及び支持方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102236A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Manufacuturing method of semiconductor device
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS57188347U (ko) * 1981-05-22 1982-11-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102236A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Manufacuturing method of semiconductor device
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS57188347U (ko) * 1981-05-22 1982-11-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012156416A (ja) * 2011-01-28 2012-08-16 Lintec Corp 支持装置及び支持方法

Also Published As

Publication number Publication date
JPH069492Y2 (ja) 1994-03-09

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