JPS63153527U - - Google Patents
Info
- Publication number
- JPS63153527U JPS63153527U JP4556287U JP4556287U JPS63153527U JP S63153527 U JPS63153527 U JP S63153527U JP 4556287 U JP4556287 U JP 4556287U JP 4556287 U JP4556287 U JP 4556287U JP S63153527 U JPS63153527 U JP S63153527U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- generation chamber
- grounded
- chamber
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4556287U JPS63153527U (enExample) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4556287U JPS63153527U (enExample) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153527U true JPS63153527U (enExample) | 1988-10-07 |
Family
ID=30864409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4556287U Pending JPS63153527U (enExample) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153527U (enExample) |
-
1987
- 1987-03-30 JP JP4556287U patent/JPS63153527U/ja active Pending
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