JPS63153521U - - Google Patents
Info
- Publication number
- JPS63153521U JPS63153521U JP4807887U JP4807887U JPS63153521U JP S63153521 U JPS63153521 U JP S63153521U JP 4807887 U JP4807887 U JP 4807887U JP 4807887 U JP4807887 U JP 4807887U JP S63153521 U JPS63153521 U JP S63153521U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pair
- supporting
- cvd furnace
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807887U JPS63153521U (OSRAM) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4807887U JPS63153521U (OSRAM) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153521U true JPS63153521U (OSRAM) | 1988-10-07 |
Family
ID=30869279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4807887U Pending JPS63153521U (OSRAM) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153521U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009081258A (ja) * | 2007-09-26 | 2009-04-16 | Tokyo Electron Ltd | 熱処理方法及び熱処理装置 |
-
1987
- 1987-03-30 JP JP4807887U patent/JPS63153521U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009081258A (ja) * | 2007-09-26 | 2009-04-16 | Tokyo Electron Ltd | 熱処理方法及び熱処理装置 |