JPS6315209A - Heating stage in heating device for microscope - Google Patents

Abstract

PURPOSE:To obtain an object sample temperature by small power, and to obviate an uneven temperature of a sample by providing a heating element on a stage, and placing a spherical reflection mirror for surrounding the sample on this heating element. CONSTITUTION:An eyepiece and an objective lens 1 are provided on a machine frame, and a heating stage 2 is provided under the objective lens, by which a heating device for a microscope is formed. A sample 4 can be supported on a heating element 3, an upward spherical reflection mirror 5 which surrounds the sample 4 is held by a pedestal 10, under the heating element 3, and also, a downward spherical reflection mirror 5 is placed over the heating element 3. On the top part of the downward spherical reflection mirror 5, a through-hole 11 is pierced, and a window glass 12 for observation (a rotary type or an insertion type) is placed freely slidably. Both the reflection mirrors 5, 6 are formed by a transparent ceramic material such as quartz glass, etc., and coating of platinum or a metal whose infrared ray reflection factor is high is performed to the inside surface. In this way, a sample temperature rises and falls quickly, and also, the thermal efficiency is improved, and an uneven temperature of the sample 4 can be obviated.

Description

DETAILED DESCRIPTION OF THE INVENTION "Industrial Application" The present invention relates to a heating stage in a heating device for a microscope.

"Conventional technology" Conventional heating devices for microscopes do not allow samples to be placed on the heating element! kt
1. ．． Only the high temperature state was observed. The heat dissipation from the heating element and the sample is large, and the thermal efficiency per unit power supplied to the heating element is poor, requiring a large amount of 1°C force to obtain the desired heating temperature, which tends to cause temperature unevenness. In addition, a large amount of 111 was retained when the humidity increased and decreased.

"Problems to be Solved by the Invention J The purpose of the present invention is to quickly raise and lower the sample humidity on the stage, obtain the desired sample temperature with a small amount of electric power, and eliminate the temperature unevenness of the sample. 0 "Means for Solving the Intermediate Point" The present invention provides a heating device for a microscope in which a heating stage is provided below the objective lens of an existing microscope. !Constructed by a heating stage in a microscope heating device t, which includes a spherical reflecting mirror γt that surrounds a sample on a heating body.

``Effect'' Therefore, when a sample is placed on a heating element, a spherical reflecting mirror is placed in contact with the heating element, the sample is surrounded by the reflection mirror, and a current is passed through the heating element to heat it, the sample generates heat. The sample is heated by heat conduction due to the heat generated by the body, and the radiant heat generated from the heating element is reflected by the reflector 1 and the heat rays are concentrated on the sample, so the sample is heated significantly and its humidity quickly rises to the required grade 7. do. after that! ! When the source is opened, the temperature of the heating element and the sample decreases.

"Example" A heating device for a microscope is formed by providing an eyepiece and an objective lens 1 on a machine frame, and providing a heating stage 2 below the objective lens 1. As shown in FIG. 1 of the above-mentioned stage 2, a cooling air pipe 6 for the objective lens 1 is provided at the lower part of the outer periphery of the objective lens 1, a cooling water jacket 7 is provided in two stages around the outer periphery, and a support plate 8 is provided at the lower part of the cooling water jacket 7. The conductor a9.9 is inserted into the inside from both ends of the lower jacket 7, and the heating element 3 is inserted between the conductor wires 9.90.
and connect conductor 9.9 to the IIt source. The heating element 3 is tentatively formed of a platinum plate, platinum mesh, parallel platinum wire, etc., and various high melting point heating elements can be used instead of platinum. A sample 4 can be supported on the heating element 3, and an upward spherical reflection plate 5 surrounding the sample 4 is held on the lower surface of the heating element 3 by a pedestal lO, and the upper surface of the heating element 3 is A downward spherical reflection @5 is placed on the surface. A through hole 11 is bored at the top of the downward spherical reflecting mirror 5, and an observation window glass 1 is provided.
2 (rotating type or insertion type) is slidably placed thereon, and when observing with transmitted light, it is preferable to also make a through hole in the center of the downward spherical reflecting mirror 5. The bidirectional mirror 5.5 is made of a transparent ceramic material such as quartz glass, and its inner surface is coated with a metal having high infrared reflectance, such as platinum. The membrane 13 is sandwiched between transparent ceramics 14 and 14 in the form of a sandwich.
Alternatively, as shown in FIG. 3, a layer of transparent ceramic 14 (such as fused silica) may be formed on the inner surface of the metal spherical reflecting mirror 5 to wipe or clean the surface of the ceramic 14 without damaging the metal reflecting surface. The observation window glass 12 is made by forming a vapor-deposited metal film 15 of about 100 to 1000 mm thick (for reflection in the infrared region) on a transparent ceramic plate 14 (Fig. 4); may be grown in a sandwich-like manner (Figure 5). In addition, by changing the thickness of the pad 15, the amount of transmitted light can be adjusted by sliding. The contaminated surface can be moved and observed from a new surface by the above-mentioned sliding motion. In addition, 16 in the figure is a rod for sliding operation of the observation window glass 12, A, B thermometer side points, 17
It is a thermocouple. Table 1 shows an example of measuring the power supplied to the platinum heating element and the rate of temperature rise when a reflecting sphere with a diameter of 20φ is used.

Table 1 Table 2 shows points A and E (6th point) in the sample chamber using a SiO heating element.
Figure) shows the temperature distribution.

Table 2 Table 3 shows the supplied power and the temperature reached by the platinum heating element (Table 7).
Table 3 "Effects" Since the present invention is constructed as described above, it is suitable for use in a microscope.

The sample humidity can be rapidly raised and lowered on the heating stage of the thermal device, and not only can the thermal efficiency be significantly improved, but also the temperature unevenness of the sample can be eliminated and the temperature control accuracy can be improved.

[Brief explanation of drawings]

Fig. 1 is a front view showing a heating stage in a heating device for a microscope according to the present invention, Fig. 2 is a longitudinal sectional view of an embodiment of a spherical reflecting mirror, and Fig. 3 is another embodiment of the same reflecting mirror. 4 is a longitudinal sectional view of an embodiment of the observation window glass, FIG. 5 is a longitudinal sectional view of another embodiment of the same glass, and FIG. 6 is a plan view of a reflecting mirror and a heating element. FIG. 7 is a supply power-achieved humidity curve diagram, and FIG. 8 is a cooling rate diagram from 1000°C. 1. Objective lens, 2. Heating stage, 3. Heating element, 4. Sample, 5. Spherical reflecting mirror.

Claims (1)

[Claims] (1) In an existing microscope heating device in which a heating stage is provided below the objective lens of a microscope, a heating element is disposed on the stage, and a spherical reflecting mirror is arranged to surround the sample on the heating element. A heating stage in a heating device for a microscope.