JPS63151848A - 圧電振動子 - Google Patents

圧電振動子

Info

Publication number
JPS63151848A
JPS63151848A JP61300274A JP30027486A JPS63151848A JP S63151848 A JPS63151848 A JP S63151848A JP 61300274 A JP61300274 A JP 61300274A JP 30027486 A JP30027486 A JP 30027486A JP S63151848 A JPS63151848 A JP S63151848A
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
electrode
piezoelectric
vibrator
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61300274A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521476B2 (enrdf_load_stackoverflow
Inventor
Michihiko Tsuruoka
鶴岡　亨彦
Wataru Nakagawa
亘 中川
Masafumi Machida
町田　雅史
Naohiro Konosu
直広 鴻巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP61300274A priority Critical patent/JPS63151848A/ja
Priority to GB8728115A priority patent/GB2200211B/en
Priority to US07/129,521 priority patent/US4961345A/en
Priority to DE19873741568 priority patent/DE3741568A1/de
Publication of JPS63151848A publication Critical patent/JPS63151848A/ja
Publication of JPH0521476B2 publication Critical patent/JPH0521476B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP61300274A 1986-12-08 1986-12-17 圧電振動子 Granted JPS63151848A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61300274A JPS63151848A (ja) 1986-12-17 1986-12-17 圧電振動子
GB8728115A GB2200211B (en) 1986-12-08 1987-12-01 Vibration-type transducer
US07/129,521 US4961345A (en) 1986-12-08 1987-12-07 Vibration type transducer
DE19873741568 DE3741568A1 (de) 1986-12-08 1987-12-08 Vorrichtung und verfahren zur erfassung der resonanzfrequenz eines schwingungsorgans, das mit einem fluid in beruehrung steht

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61300274A JPS63151848A (ja) 1986-12-17 1986-12-17 圧電振動子

Publications (2)

Publication Number Publication Date
JPS63151848A true JPS63151848A (ja) 1988-06-24
JPH0521476B2 JPH0521476B2 (enrdf_load_stackoverflow) 1993-03-24

Family

ID=17882816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61300274A Granted JPS63151848A (ja) 1986-12-08 1986-12-17 圧電振動子

Country Status (1)

Country Link
JP (1) JPS63151848A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0004547D0 (sv) * 2000-12-07 2000-12-07 Amersham Pharmacia Biotech Kk Chip quartz oscillator and sensor

Also Published As

Publication number Publication date
JPH0521476B2 (enrdf_load_stackoverflow) 1993-03-24

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