JPS63151844A - X-ray photoelectron analyzer - Google Patents
X-ray photoelectron analyzerInfo
- Publication number
- JPS63151844A JPS63151844A JP61300256A JP30025686A JPS63151844A JP S63151844 A JPS63151844 A JP S63151844A JP 61300256 A JP61300256 A JP 61300256A JP 30025686 A JP30025686 A JP 30025686A JP S63151844 A JPS63151844 A JP S63151844A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ray
- lens system
- rays
- photoelectron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000005855 radiation Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000333 X-ray scattering Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】 （イ）産業上の利用分野 本発明は、Ｘ線光電子分析装置に関する。[Detailed description of the invention] (b) Industrial application fields The present invention relates to an X-ray photoelectron analysis device.
（ロ）従来技術とその問題点
従来のＸ線光電子分析装置には、第６図に示すものがあ
る。このＸ線光電子分析装置は、Ｘ線銃ａから試料すに
対して軟Ｘ線を照射し、試料すの表面から励起されて放
出される光電子をレンズ系０木春１アーｆｆｌ十ノしざ
−？＋−７１ぜｄ２、−道し二１−ア−エネルギーアナ
ライザｄでエネルギー分離された光電子を検出器ｆで検
出し、その検出出力を増幅器ｇで増幅した後、信号測定
系りでエネルギースペクトルが測定されて、試料す中の
元素分析等を行なう。(b) Prior art and its problems A conventional X-ray photoelectron analyzer includes one shown in FIG. This X-ray photoelectron analyzer irradiates a sample with soft X-rays from an X-ray gun a, and collects photoelectrons excited and emitted from the surface of the sample using a lens system. −? +-71zed2, -Method 21-A- The photoelectrons energy-separated by the energy analyzer d are detected by the detector f, and after the detection output is amplified by the amplifier g, the energy spectrum is determined by the signal measurement system. After being measured, elemental analysis, etc. in the sample is performed.
ところで、検出感度を高めるには、Ｘ線銃ａを試料すに
近付けて試料すに照射される軟Ｘ線の強度を強くし、ま
た、レンズ系Ｃには大口径のものを使用するとともに、
これをできるだけ試、料すに近付けて試料すから放出さ
れる光電子を効率良くエネルギーアナライザｄに導くこ
とが望ましい。By the way, in order to increase the detection sensitivity, bring the X-ray gun a closer to the sample to increase the intensity of the soft X-rays irradiated to the sample, and use a large diameter lens system C.
It is desirable to bring this as close to the sample as possible to efficiently guide the photoelectrons emitted from the sample to the energy analyzer d.
しかしながら、従来構造のものでは、Ｘ線銃ａとレンズ
系Ｃとを共に試料すに近付けると、互いが当接してしま
い、それ以上接近させることができなくなる。そのため
、従来のらのでは、検出感度の向上には自ずから限界が
あった。However, in the conventional structure, when both the X-ray gun a and the lens system C are brought close to the sample, they come into contact with each other and cannot be brought closer any further. For this reason, there was a natural limit to the improvement of detection sensitivity with conventional RA.
本発明は、このような事情に鑑みてなされたものであっ
て、Ｘ線強度を低下させることなく試料に対してレンズ
系を近接させることができて、従来よりも一層検出感度
を高めることができるようにすることを目的とする。The present invention has been made in view of these circumstances, and allows the lens system to be brought close to the sample without reducing the X-ray intensity, making it possible to further increase detection sensitivity than in the past. The purpose is to make it possible.
（ハ）問題点を解決するための手段
本発明は、上記の目的を達成するために、次の構成を採
る。すなわち、本発明のＸ線光電子分析装置は、試料か
ら放出される光電子をエネルギーアナライザに導くレン
ズ系の光電子導入口に近接して試料励起用の軟Ｘ線を導
くＸ線ガイドチューブの一端を開設し、このＸ線ガイド
チューブの他端を前記レンズ系から離間して配置された
Ｘ線銃に対向して設けている。(c) Means for solving the problems In order to achieve the above object, the present invention adopts the following configuration. That is, in the X-ray photoelectron analyzer of the present invention, one end of the X-ray guide tube for guiding soft X-rays for sample excitation is provided close to the photoelectron inlet of the lens system that guides photoelectrons emitted from the sample to the energy analyzer. However, the other end of this X-ray guide tube is provided opposite to the X-ray gun, which is spaced apart from the lens system.
（ニ）作用
本発明のＸ線光電子分析装置では、レンズ系から離間し
て配置されたＸ線銃から放射される軟Ｘ線がＸ線ガイド
チューブによって試料の近傍まで導かれ、試料表面とレ
ンズ系のわずかな隙間から照射される。これにより、Ｘ
線強度を低下させることなくレンズ系を試料に接近させ
ることが可能となるので、高感度の測定が行なえる。(D) Function In the X-ray photoelectron analyzer of the present invention, soft X-rays emitted from the X-ray gun placed apart from the lens system are guided to the vicinity of the sample by the X-ray guide tube, and the sample surface and lens The light is irradiated through a small gap in the system. This results in
Since it is possible to bring the lens system close to the sample without reducing the line intensity, highly sensitive measurements can be performed.
（ホ）実施例
第１図は本発明の実施例に係るＸ線光電子分析装置の構
成図である。同図において、符号ＩはＸ線光電子分析装
置の全体を示し、２は分析対象となる試料、４は試料２
を互いに直交するＸ−Ｙ方向に移動可能に設けられた試
料ステージである。(E) Embodiment FIG. 1 is a block diagram of an X-ray photoelectron analyzer according to an embodiment of the present invention. In the figure, the symbol I indicates the entire X-ray photoelectron analyzer, 2 indicates the sample to be analyzed, and 4 indicates the sample 2.
This is a sample stage that is movable in the X and Y directions that are orthogonal to each other.
また、６は静電半球型のエネルギーアナライザ、８は試
料２から放出される光電子をエネルギーアナライザ６に
導くレンズ系、ＩＯは試料２を励起して光電子を放出さ
せるための軟Ｘ線を発生するＸ線銃であって、このＸ線
銃１０はレンズ系８から離間した位置に配置されている
。Further, 6 is an electrostatic hemispherical energy analyzer, 8 is a lens system that guides photoelectrons emitted from the sample 2 to the energy analyzer 6, and IO generates soft X-rays for exciting the sample 2 and emitting photoelectrons. This X-ray gun 10 is arranged at a position separated from the lens system 8.
この実施例のＸ線光電子分析装置１の特徴は、レンズ系
８の光電子導入口１１に近接して試料励起用の軟Ｘ線を
導く複数のＸ線ガイドチューブ１２の一端が開設されて
おり、これらのＸ線ガイドチューブ１２の他端は前記レ
ンズ系８から離間して配置されたＸ線銃１０に対向して
設けられていることである。すなわち、これらのＸ線ガ
イドチューブ１２は、第２図および第３図に示すように
、各々の一端部が試料２とレンズ系８との間に配置され
るリング状の保持部材１４に挿入、固定されるとともに
、その端面が試料２に向けて開口している。また、Ｘ線
ガイドチューブ１２の他端部は、結束されてＸ線銃ｌＯ
の放射口に対向配置されている。そして、上記の保持部
材１４は真空室を構成するハウジングの壁面（図示省略
）にアーム１６で固定されている。The X-ray photoelectron analyzer 1 of this embodiment is characterized in that one end of a plurality of X-ray guide tubes 12 for guiding soft X-rays for sample excitation is opened close to the photoelectron inlet 11 of the lens system 8. The other ends of these X-ray guide tubes 12 are provided facing an X-ray gun 10 that is spaced apart from the lens system 8. That is, as shown in FIGS. 2 and 3, one end of each of these X-ray guide tubes 12 is inserted into a ring-shaped holding member 14 disposed between the sample 2 and the lens system 8. It is fixed, and its end face is open toward the sample 2. In addition, the other end of the X-ray guide tube 12 is tied to the X-ray gun lO.
is placed opposite the radiation port of the The holding member 14 is fixed by an arm 16 to a wall surface (not shown) of a housing that constitutes a vacuum chamber.
゛ Ｘ線ガイドチューブ１２としては、第４図および第
５図に示すように、ガラスや金属でできたテープ１８の
一面にＸ線反射用のタングステン層２０とスペーサ用の
カーボン層２２とを蒸着等によって交互に積層してなる
多結晶膜２４を形成した後、このテープ１８を螺旋巻き
して成形したものが適用される。上記のテープ１８は、
Ｘ線が散乱、干渉を起こさないように表面荒さが数μｍ
オーダの精度となるように予め調整される。なお、Ｘ線
ガイドチューブ１２としては、上記の構成のものがＸ線
を効率良く試料２に導くことができる点から好ましいが
、その池、表面荒さを調整したガラス管を使用すること
も可能である。゛ For the X-ray guide tube 12, as shown in FIGS. 4 and 5, a tungsten layer 20 for X-ray reflection and a carbon layer 22 for a spacer are deposited on one surface of a tape 18 made of glass or metal. After a polycrystalline film 24 is formed by alternately laminating layers, the tape 18 is spirally wound and shaped. The above tape 18 is
The surface roughness is several μm to prevent X-ray scattering and interference.
It is adjusted in advance to achieve the accuracy of the order. Note that as the X-ray guide tube 12, one having the above configuration is preferable from the standpoint of efficiently guiding the X-rays to the sample 2, but it is also possible to use a glass tube whose surface roughness has been adjusted. be.
２８は出射スリット、３０はエネルギーアナライザ６の
エネルギー走査を行なうための直流電源、３２はエレク
トロンマルチプライヤ等の検出器、３４は検出器３２の
出力を増幅する増幅器、３６は増幅器３４からの検出信
号に基づいてエネルギースペクトルを測定する信号測定
系である。28 is an output slit, 30 is a DC power supply for performing energy scanning of the energy analyzer 6, 32 is a detector such as an electron multiplier, 34 is an amplifier that amplifies the output of the detector 32, and 36 is a detection signal from the amplifier 34. This is a signal measurement system that measures energy spectra based on
本発明のＸ線光電子分析装置ｌでは、レンズ系８から離
間して配置されたＸ線銃１０から放射される軟Ｘ線は、
Ｘ線ガイドチューブ１２内の多結晶膜２４によって多重
回折を起こしながら試料２の近傍まで導かれる。そして
、このＸ線ガイドチューブ１２の端面から出射した軟Ｘ
線が試料２の表面に照射される。In the X-ray photoelectron analyzer l of the present invention, the soft X-rays emitted from the X-ray gun 10, which is placed apart from the lens system 8,
The polycrystalline film 24 inside the X-ray guide tube 12 causes multiple diffraction while guiding the X-ray to the vicinity of the sample 2. Soft X emitted from the end face of this X-ray guide tube 12
A beam is irradiated onto the surface of the sample 2.
したがって、Ｘ線強度を低下さ什ることなく軟Ｘ線を試
料２に照射できるとともに、レンズ系８の光電子導入口
１１を極力試料２の表面に接近させることが可能となる
ので、試料２から放出される光電子を効率良くエネルギ
ーアナライザ６に導くことができ、その結果、高感度の
測定が可能となお、この実施例では、エネルギーアナラ
イザ６として静電半球型のものを使用しているが、これ
に限定されるものではなく、非分散型、ＣＭ Ａ型等の
エネルギーアナライザを適用することができる。Therefore, it is possible to irradiate the sample 2 with soft X-rays without reducing the X-ray intensity, and it is also possible to bring the photoelectron inlet 11 of the lens system 8 as close to the surface of the sample 2 as possible. The emitted photoelectrons can be efficiently guided to the energy analyzer 6, and as a result, highly sensitive measurement is possible.In this embodiment, an electrostatic hemispherical type energy analyzer 6 is used. The present invention is not limited to this, and a non-dispersive type energy analyzer, a CMA type energy analyzer, or the like can be applied.
（へ）効果
以上のように本発明によれば、Ｘ線強度を低下させるこ
となく試料に対してレンズ系を近接させることが可能と
なるので、従来よりも一層検出感度を高めることができ
るようになる等の優れた効果が発揮される。(f) Effects As described above, according to the present invention, it is possible to bring the lens system close to the sample without reducing the X-ray intensity, so detection sensitivity can be further increased than before. Excellent effects such as
第１図ないし第５図は本発明の実施例を、第６図は従来
例をそれぞれ示すもので、第１図はＸ線光電子分析装置
の構成図、第２図はＸ線ガノ５ドチューブの配置状態を
示す平面図、第３図は第２図の［［−Ｉ［［線に沿う断
面図、第４図はＸ線ガイドチューブの一部を示す斜視図
、第５図は同チューブ内面に形成された多結晶膜の構造
を示す説明図、第６図はＸ線光電子分析装置の構成図で
ある。
１・・・Ｘ線光電子分析装置、２・・・試料、６・・・
エネルギーアナライザ、８・・・レンズ系、１０・・・
Ｘ線銃、１１・・・光電子導入口、１２・・・Ｘ線ガイ
ドチューブ。Figures 1 to 5 show an embodiment of the present invention, and Figure 6 shows a conventional example. Figure 1 is a configuration diagram of an X-ray photoelectron analyzer, and Figure 2 is a diagram of an FIG. 3 is a sectional view taken along the [[-I[[ line in FIG. FIG. 6 is an explanatory diagram showing the structure of the polycrystalline film formed in FIG. 1...X-ray photoelectron analyzer, 2...sample, 6...
Energy analyzer, 8... Lens system, 10...
X-ray gun, 11... photoelectron inlet, 12... X-ray guide tube.
Claims (1)
ザに導くレンズ系の光電子導入口に近接して試料励起用
の軟Ｘ線を導くＸ線ガイドチューブの一端を開設し、こ
のＸ線ガイドチューブの他端を前記レンズ系から離間し
て配置されたＸ線銃に対向して設けたことを特徴とする
Ｘ線光電子分析装置。(1) One end of an X-ray guide tube that guides soft X-rays for sample excitation is opened close to the photoelectron inlet of the lens system that guides photoelectrons emitted from the sample to the energy analyzer; An X-ray photoelectron analyzer characterized in that an end of the X-ray photoelectron analyzer is provided facing an X-ray gun that is placed apart from the lens system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61300256A JPS63151844A (en) | 1986-12-16 | 1986-12-16 | X-ray photoelectron analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61300256A JPS63151844A (en) | 1986-12-16 | 1986-12-16 | X-ray photoelectron analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63151844A true JPS63151844A (en) | 1988-06-24 |
Family
ID=17882593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61300256A Pending JPS63151844A (en) | 1986-12-16 | 1986-12-16 | X-ray photoelectron analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63151844A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5312194A (en) * | 1990-11-30 | 1994-05-17 | Citizen Watch Co., Ltd. | Printing head for printer |
| JP2013523257A (en) * | 2010-03-29 | 2013-06-17 | ザ・ボーイング・カンパニー | Small diameter X-ray tube |
-
1986
- 1986-12-16 JP JP61300256A patent/JPS63151844A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5312194A (en) * | 1990-11-30 | 1994-05-17 | Citizen Watch Co., Ltd. | Printing head for printer |
| JP2013523257A (en) * | 2010-03-29 | 2013-06-17 | ザ・ボーイング・カンパニー | Small diameter X-ray tube |
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