JPS59141045A - X-ray analytical apparatus - Google Patents
X-ray analytical apparatusInfo
- Publication number
- JPS59141045A JPS59141045A JP1526283A JP1526283A JPS59141045A JP S59141045 A JPS59141045 A JP S59141045A JP 1526283 A JP1526283 A JP 1526283A JP 1526283 A JP1526283 A JP 1526283A JP S59141045 A JPS59141045 A JP S59141045A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- ray detector
- solar slit
- magnet
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
イ、産業上の利用分野
本発明は炭素、硼素、窒素等の軽元素の分析に−適した
Ｘ線分析装置に関する。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to an X-ray analyzer suitable for analyzing light elements such as carbon, boron, and nitrogen.
口・従来技術
炭素とか硼素或は窒素等の超軽元素の原子を励起したと
き発せられるＸ線は波長が長いので分光結晶を用いる分
光法が適用できず、Ｘ線を鏡面に、その面に平行に近い
入射角で入射させ、鏡面による全反射を利用して短波長
のＸ線と分離しヤ検出する方法が用いられている。この
場合エネルギーの低い長波長のＸ線を検出するためＸ線
検出回路の増幅度を上げているので試料を励起する放射
線従来全反射鏡と試料との間に磁石を配置してＸ線検出
器の方へ向う電子線の経路を曲げて光電子等がＸ線検出
器に飛び込むのを防いでいたが、実際上は殆んど効果が
認められず、Ｘ線による超軽元素の高感度の分析はきわ
めで困難であった。以下この点をもう少し詳しく説明す
る。- Prior art The X-rays emitted when atoms of ultralight elements such as carbon, boron, or nitrogen are excited have long wavelengths, so spectroscopy using a spectroscopic crystal cannot be applied, so A method is used in which X-rays are made incident at an almost parallel angle of incidence, and total reflection by a mirror surface is used to separate them from short-wavelength X-rays and detect them. In this case, the amplification of the X-ray detection circuit is increased in order to detect long-wavelength X-rays with low energy, so the radiation that excites the sample is conventionally used with a magnet placed between the total reflection mirror and the sample. This method bent the path of the electron beam toward the X-ray to prevent photoelectrons from jumping into the X-ray detector, but in practice this had little effect, and the high-sensitivity analysis of ultralight elements using X-rays was difficult. was extremely difficult. This point will be explained in more detail below.
第１図は従来の螢光Ｘ線分析装置を示す。１は励起用の
一次Ｘ線源、２は試料で、３が全反射鏡、４がＸ線検出
器で、５はＸ線検出器４０前面に配置されたソーラスリ
ットである。Ｘ線検出器４にはガスフロー比例計数管が
用いられている。試料２は一次Ｘ線の照射を受けて螢光
Ｘ線Ｘを放射する。全反射鏡５とＸ線検出器４及び試料
２の位置関係は、試料から出た螢光Ｘ線が例えば炭素分
析の場合約８°の角度で全反射鏡面に入射し、同じ角度
で全反射されたＸ線が検出器４に入射するようにしであ
る。このように全反射鏡３に対して人、反対側Ｘ線が平
行に近いから、Ｘ線検出器４からはノーラスリット５を
通しても試料２を望むことができ試料２から出た光電子
のうちＸ線検出器従来は試料２と全反射鏡３との間に磁
石Ｍを置き、試料からＸ線検出器の方へ向けて放出され
た光電子の進路を曲げてＸ線検出器４に入るのを防ぐよ
うにしていた。しかしこの場合、試料からＸ線検出器と
は異る方向へ放出された光電子の経路が磁殆んど効果が
なかった。FIG. 1 shows a conventional fluorescent X-ray analyzer. 1 is a primary X-ray source for excitation, 2 is a sample, 3 is a total reflection mirror, 4 is an X-ray detector, and 5 is a solar slit placed in front of the X-ray detector 40. The X-ray detector 4 uses a gas flow proportional counter. The sample 2 emits fluorescent X-rays X upon being irradiated with the primary X-rays. The positional relationship between the total reflection mirror 5, the X-ray detector 4, and the sample 2 is such that, for example, in the case of carbon analysis, the fluorescent X-rays emitted from the sample enter the total reflection mirror surface at an angle of about 8 degrees, and are totally reflected at the same angle. The X-rays are incident on the detector 4. In this way, since the X-rays on the opposite side are almost parallel to the total reflection mirror 3, the X-ray detector 4 can see the sample 2 even through the Nora slit 5, and the photoelectrons emitted from the sample 2 are Ray Detector Conventionally, a magnet M is placed between the sample 2 and the total reflection mirror 3 to bend the path of photoelectrons emitted from the sample toward the X-ray detector and prevent them from entering the X-ray detector 4. I was trying to prevent it. However, in this case, the path of photoelectrons emitted from the sample in a direction different from that of the X-ray detector had little effect.
へ目的
本発明は軽元素から発せられる長波長のＸ線によって軽
元素の分析する場合における上述した光電子等によシ発
生−ｈシー減してＸ線分析法による軽元素の検出感度を
高めることを目的とするＯ
二、構成
本発明はＸ線検出器の前面に磁場を形成するように磁石
を配置したＸ線分析装置を提供する。Purpose of the present invention is to reduce the damage caused by photoelectrons, etc. mentioned above when analyzing light elements using long-wavelength X-rays emitted from the light elements, and to increase the detection sensitivity of light elements by X-ray analysis. 2. Structure The present invention provides an X-ray analyzer in which a magnet is arranged in front of an X-ray detector to form a magnetic field.
ホ、実施例
この実施例は第１図を利用して説明すればソーラスリッ
ト５の側面に磁石を配置するものである。E. Embodiment This embodiment will be explained using FIG. 1, in which a magnet is arranged on the side surface of the solar slit 5.
Ｘ線分析装置としての全体的な構成は第１図と同じであ
るので、第２図に実施例におけるＸ線検出器部分だけを
示す。Ｘ線検出器４はガスフロー比例計数管で、Ｂは本
体、Ｃは芯線で、これが陽極になっている。ＷはＸ線入
射窓で１μｍの厚さのポリプロピレンフィルムＦが張設
してあり、ソーラスリット５のケース５ＣがフィルムＦ
の押えに兼用されている。ソーラスリット５は数枚の鉄
板５ｐを平行に配置したものであり、ソーラスリットケ
ースの側板５Ｃが磁石板になっている。この磁石板は厚
さ方向に磁化され、磁極は図示のように形成されている
。従って磁場は下向き矢印方向に形成され、スリイトの
鉄板５ｐに平行に図左方からソーラスリット５に入射し
た電子の経路は図の紙面に垂直にこちらに向けて曲げら
れ、Ｘ線検出器４の窓Ｗから反らされる。Since the overall configuration of the X-ray analysis apparatus is the same as that shown in FIG. 1, FIG. 2 shows only the X-ray detector portion in the embodiment. The X-ray detector 4 is a gas flow proportional counter tube, B is a main body, and C is a core wire, which serves as an anode. W is an X-ray entrance window over which a polypropylene film F with a thickness of 1 μm is stretched, and the case 5C of the solar slit 5 is the film F.
It is also used as a presser foot. The solar slit 5 is made up of several iron plates 5p arranged in parallel, and the side plate 5C of the solar slit case is a magnetic plate. This magnet plate is magnetized in the thickness direction, and the magnetic poles are formed as shown. Therefore, the magnetic field is formed in the direction of the downward arrow, and the path of the electrons that entered the solar slit 5 from the left side of the figure parallel to the iron plate 5p of the slit is bent toward this direction perpendicular to the plane of the figure, and It is warped from window W.
第３図は上述実施例の斜視図で、５ｙはソーラスリット
のケースを兼ねた軟鉄板のヨークで磁石板５Ｃに対する
磁気回路を構成してソーラスリット内の空間に形成され
る磁場を強めている。FIG. 3 is a perspective view of the above-mentioned embodiment, where 5y is a soft iron plate yoke that also serves as a case for the solar slit, and constitutes a magnetic circuit for the magnet plate 5C to strengthen the magnetic field formed in the space inside the solar slit. .
Ｘ線検出器の前面に磁場を形成する方法は上述したよう
な構造だけに限られない。例えば第３図において上下方
向に磁場を形成するように上下に磁石を設けてもよい。The method of forming a magnetic field in front of the X-ray detector is not limited to the structure described above. For example, in FIG. 3, magnets may be provided above and below so as to form a magnetic field in the vertical direction.
この場合ソーラスリットを構成する平行板は非磁性材料
が望ましい。In this case, the parallel plates constituting the solar slit are preferably made of non-magnetic material.
へ、効果
本発明によるときは、Ｘ線検出器の前面まで飛来する電
子はその経路の方向が略々試料とＸ線検出器とを結ぶ方
向に揃っているので、Ｘ線検出器の前面に磁場を形成す
ることにより、殆んど全部がＸ線検出器のＸ線入射窓か
ら反らされ、異る方向の電子が磁場で曲げられた結果、
Ｘ線検出器に入射するようになると云った可能性がなく
なり、光電子等によって発生するバックグランドが従来
に比し著るしく低減し、Ｘ線検出のＳ ／ Ｎ比を向上
させることができる。第４図は本発明の効果を例示する
グラフで、鋳鉄中の炭素の検量線（Ｘ線検出強度と炭素
濃度との関係グラフ）を示す。この図でＡは従来例、Ｂ
は本発明における検量線、縦軸はＸ線強度、横軸は鋳鉄
中の炭素濃度である。Effects According to the present invention, since the direction of the path of the electrons flying to the front of the X-ray detector is approximately aligned in the direction connecting the sample and the X-ray detector, the electrons flying to the front of the X-ray detector By creating a magnetic field, almost all of them are deflected away from the X-ray entrance window of the X-ray detector, and as a result of the electrons in different directions being bent by the magnetic field,
There is no possibility that the photoelectrons will enter the X-ray detector, the background generated by photoelectrons, etc. is significantly reduced compared to the conventional method, and the S/N ratio of X-ray detection can be improved. FIG. 4 is a graph illustrating the effects of the present invention, showing a calibration curve for carbon in cast iron (a graph of the relationship between X-ray detection intensity and carbon concentration). In this figure, A is the conventional example, and B
is the calibration curve in the present invention, the vertical axis is the X-ray intensity, and the horizontal axis is the carbon concentration in cast iron.
士の印は従来例、本発明の夫々において、Ｓ ／ Ｎ比
１となる炭素濃度とＸ線強度を示す。Ｓ ／ Ｎ比が１
まで定量測定が可能とすると、従来例では炭素濃度３．
２係までしか測定できなかったの゛が、本発明によれば
濃度１．６ｑ６まで測定可能となり、感度が２倍に向上
したことになる。The mark indicates the carbon concentration and X-ray intensity at which the S/N ratio is 1 in both the conventional example and the present invention. S/N ratio is 1
If quantitative measurement is possible up to a carbon concentration of 3.
Previously, it was possible to measure only up to 2 levels, but according to the present invention, it is now possible to measure concentrations up to 1.6q6, which means that the sensitivity has been doubled.
第１図は従来例の平面図、第２図は本発明の一実施例に
おけるＸ線検出部の水平断面図、第３図は同実施例Ｘ線
検出部の斜視図、第４図は本発明の効果を例示するグラ
フである。
１・・・励起用−次Ｘ線源、２・・・試料、３・・・全
反射鏡、４・・・Ｘ線検出器、５ ・ソーラスリット、
５ｃ・・・ソーラスリットのケース兼磁石板、５ｐ・・
・ソーラスリットを構成する板、５ｙ・・ヨーク。
代理人 弁理士 縣 浩 介
ΦＣ
紫４図FIG. 1 is a plan view of a conventional example, FIG. 2 is a horizontal sectional view of an X-ray detection section in an embodiment of the present invention, FIG. 3 is a perspective view of the X-ray detection section of the same embodiment, and FIG. It is a graph illustrating the effect of the invention. 1... Excitation-order X-ray source, 2... Sample, 3... Total reflection mirror, 4... X-ray detector, 5 - Solar slit,
5c...Solar slit case and magnet plate, 5p...
・The plate that makes up the solar slit, 5y...Yoke. Agent Patent Attorney Hiroshi Agata ΦC Murasaki 4
Claims (1)
を磁石によって構成したことを特徴とするＸ線分析装置
。An X-ray analysis device characterized in that a case of a solar slit placed in front of an X-ray detector is made of a magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526283A JPS59141045A (en) | 1983-01-31 | 1983-01-31 | X-ray analytical apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526283A JPS59141045A (en) | 1983-01-31 | 1983-01-31 | X-ray analytical apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59141045A true JPS59141045A (en) | 1984-08-13 |
| JPH0456274B2 JPH0456274B2 (en) | 1992-09-07 |
Family
ID=11883935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1526283A Granted JPS59141045A (en) | 1983-01-31 | 1983-01-31 | X-ray analytical apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59141045A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125549A (en) * | 1983-11-22 | 1985-07-04 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | X-ray analyzer with deflection system |
| JPS6355199U (en) * | 1986-09-29 | 1988-04-13 | ||
| JP2000098091A (en) * | 1998-09-28 | 2000-04-07 | Rigaku Corp | Solar slit and x-ray device |
| JP2013096968A (en) * | 2011-11-07 | 2013-05-20 | Jeol Ltd | Energy dispersion type x-ray detector |
| WO2023210633A1 (en) * | 2022-04-28 | 2023-11-02 | 株式会社堀場製作所 | Radiation detection device and radiation detector |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53161687U (en) * | 1977-05-23 | 1978-12-18 | ||
| JPS55113955U (en) * | 1979-02-02 | 1980-08-11 |
-
1983
- 1983-01-31 JP JP1526283A patent/JPS59141045A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53161687U (en) * | 1977-05-23 | 1978-12-18 | ||
| JPS55113955U (en) * | 1979-02-02 | 1980-08-11 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125549A (en) * | 1983-11-22 | 1985-07-04 | エヌ・ベー・フイリツプス・フルーイランペンフアブリケン | X-ray analyzer with deflection system |
| JPS6355199U (en) * | 1986-09-29 | 1988-04-13 | ||
| JP2000098091A (en) * | 1998-09-28 | 2000-04-07 | Rigaku Corp | Solar slit and x-ray device |
| JP2013096968A (en) * | 2011-11-07 | 2013-05-20 | Jeol Ltd | Energy dispersion type x-ray detector |
| WO2023210633A1 (en) * | 2022-04-28 | 2023-11-02 | 株式会社堀場製作所 | Radiation detection device and radiation detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456274B2 (en) | 1992-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Graczyk et al. | Scanning electron diffraction attachment with electron energy filtering | |
| JPS59141045A (en) | X-ray analytical apparatus | |
| JP2002189004A (en) | X-ray analyzer | |
| Lees et al. | Direct beta autoradiography using microchannel plate (MCP) detectors | |
| JP2637871B2 (en) | X-ray counter | |
| US4320295A (en) | Panoramic ion detector | |
| Jaklevic et al. | Quantitative X-ray fluorescence analysis using monochromatic synchrotron radiation | |
| Blomker et al. | Response of plastic scintillators in magnetic fields | |
| JPS6073447A (en) | Light element fluorescent x-ray spectroscope | |
| Bigler et al. | Quantitative mapping of atomic species by X-ray absorption spectroscopy and contact microradiography | |
| CA1237830A (en) | X-ray analysis apparatus comprising a deflection system | |
| JPS6378056A (en) | Total reflection fluorescent x-ray analyzer | |
| JP3946643B2 (en) | X-ray analysis method for light particle device | |
| JPH0220679Y2 (en) | ||
| Sevier | Emulsion as a detector of individual electrons for use in beta-spectroscopy | |
| JPH0611466A (en) | Method and device for fluorescent x-ray spectrometry | |
| JP5846469B2 (en) | Total reflection X-ray fluorescence analyzer and total reflection X-ray fluorescence analysis method | |
| JPS5812123Y2 (en) | X-ray analysis equipment for electron microscopes, etc. | |
| JPH07318658A (en) | X-ray energy detector | |
| JPS63151844A (en) | X-ray photoelectron analyzer | |
| JPH0434349A (en) | X-ray fluorescence analyzer | |
| JP4478792B2 (en) | Back-mounted X-ray detection method | |
| JPH07107518B2 (en) | Primary ion irradiation method | |
| JPH08226904A (en) | Analytical electron microscope and analytical method | |
| JP3195046B2 (en) | Total reflection state detection method and trace element measuring device |