JPS6315044U - - Google Patents
Info
- Publication number
- JPS6315044U JPS6315044U JP10826386U JP10826386U JPS6315044U JP S6315044 U JPS6315044 U JP S6315044U JP 10826386 U JP10826386 U JP 10826386U JP 10826386 U JP10826386 U JP 10826386U JP S6315044 U JPS6315044 U JP S6315044U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- gas supply
- drying gas
- semiconductor wafer
- spinner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案装置の一部を断面にした略示正
面図である。
１…半導体ウエーハの吸着支持面、１ａ…吸引
溝、３…モータ、４…負圧吸引ポンプ、５…管路
、６…洗浄用溶剤及び純水の吐出ノズル、７ａ，
７ｂ…切替弁、５ａ…溶剤及び純水回収管路、５
ｂ…乾燥用ガスの供給管路。
FIG. 1 is a schematic front view of the device of the present invention, with a part thereof cut away. DESCRIPTION OF SYMBOLS 1...Semiconductor wafer suction support surface, 1a...Suction groove, 3...Motor, 4...Negative pressure suction pump, 5...Pipe line, 6...Discharge nozzle for cleaning solvent and pure water, 7a,
7b...Switching valve, 5a...Solvent and pure water recovery pipe, 5
b...Drying gas supply pipe.
Claims (1)
ナーに、洗浄液及び乾燥用ガスの供給機構を併設
したことを特徴とする半導体製造装置。 A semiconductor manufacturing device characterized in that a spinner that rotates while holding a semiconductor wafer by suction is provided with a cleaning liquid and drying gas supply mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10826386U JPS6315044U (en) | 1986-07-15 | 1986-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10826386U JPS6315044U (en) | 1986-07-15 | 1986-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315044U true JPS6315044U (en) | 1988-02-01 |
Family
ID=30985295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10826386U Pending JPS6315044U (en) | 1986-07-15 | 1986-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315044U (en) |
-
1986
- 1986-07-15 JP JP10826386U patent/JPS6315044U/ja active Pending