JPH0415241U - - Google Patents
Info
- Publication number
- JPH0415241U JPH0415241U JP5680390U JP5680390U JPH0415241U JP H0415241 U JPH0415241 U JP H0415241U JP 5680390 U JP5680390 U JP 5680390U JP 5680390 U JP5680390 U JP 5680390U JP H0415241 U JPH0415241 U JP H0415241U
- Authority
- JP
- Japan
- Prior art keywords
- water tank
- semiconductor wafer
- dicing
- rotation axis
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案の一実施例に係るダイシング装
置の概略を示す要部縦断面図、第２図イからニは
何れも同実施例のダイシング装置による半導体ウ
エハの切断を順を追つて説明する要部縦断面図、
第３図は従来のダイシング装置の概略を説明する
斜視図である。
１……ダイシングブレード、１０……可動水槽
、１１……底面、１５，１５′……流入口、１６
，１６′……流出口、２１……回転軸、３０……
半導体ウエハ。
FIG. 1 is a longitudinal cross-sectional view of a main part showing an outline of a dicing device according to an embodiment of the present invention, and FIGS. A vertical sectional view of the main parts,
FIG. 3 is a perspective view illustrating the outline of a conventional dicing device. 1... Dicing blade, 10... Movable water tank, 11... Bottom, 15, 15'... Inlet, 16
, 16'... Outlet, 21... Rotating shaft, 30...
semiconductor wafer.
Claims (1)
を支持し、略水平配置された回転軸回りに揺動す
る可動水槽と、該水槽上に配置され半導体ウエハ
と平行に相対移動するダイシングブレードとより
なることを特徴とするダイシング装置。 A movable water tank having an inflow port and an outflow port, supporting a semiconductor wafer on the bottom surface, and swinging around a rotation axis arranged substantially horizontally, and a dicing blade arranged on the water tank and moving relatively in parallel with the semiconductor wafer. A dicing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680390U JPH0415241U (en) | 1990-05-29 | 1990-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5680390U JPH0415241U (en) | 1990-05-29 | 1990-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415241U true JPH0415241U (en) | 1992-02-06 |
Family
ID=31580956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5680390U Pending JPH0415241U (en) | 1990-05-29 | 1990-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415241U (en) |
-
1990
- 1990-05-29 JP JP5680390U patent/JPH0415241U/ja active Pending