JPS6315005Y2 - - Google Patents

Info

Publication number
JPS6315005Y2
JPS6315005Y2 JP1983039245U JP3924583U JPS6315005Y2 JP S6315005 Y2 JPS6315005 Y2 JP S6315005Y2 JP 1983039245 U JP1983039245 U JP 1983039245U JP 3924583 U JP3924583 U JP 3924583U JP S6315005 Y2 JPS6315005 Y2 JP S6315005Y2
Authority
JP
Japan
Prior art keywords
plate
water
outlet
polishing
hot water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983039245U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143646U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983039245U priority Critical patent/JPS59143646U/ja
Publication of JPS59143646U publication Critical patent/JPS59143646U/ja
Application granted granted Critical
Publication of JPS6315005Y2 publication Critical patent/JPS6315005Y2/ja
Granted legal-status Critical Current

Links

JP1983039245U 1983-03-18 1983-03-18 ポリシング盤 Granted JPS59143646U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983039245U JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983039245U JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Publications (2)

Publication Number Publication Date
JPS59143646U JPS59143646U (ja) 1984-09-26
JPS6315005Y2 true JPS6315005Y2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=30169897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983039245U Granted JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Country Status (1)

Country Link
JP (1) JPS59143646U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2625466B2 (ja) * 1988-02-04 1997-07-02 ティーディーケイ株式会社 研磨装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844956A (ja) * 1981-09-10 1983-03-16 Ricoh Co Ltd ラツプ定盤の製造方法

Also Published As

Publication number Publication date
JPS59143646U (ja) 1984-09-26

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