JPS59143646U - ポリシング盤 - Google Patents

ポリシング盤

Info

Publication number
JPS59143646U
JPS59143646U JP1983039245U JP3924583U JPS59143646U JP S59143646 U JPS59143646 U JP S59143646U JP 1983039245 U JP1983039245 U JP 1983039245U JP 3924583 U JP3924583 U JP 3924583U JP S59143646 U JPS59143646 U JP S59143646U
Authority
JP
Japan
Prior art keywords
board
polishing
lower plate
communication path
polishing disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983039245U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6315005Y2 (enrdf_load_stackoverflow
Inventor
善映 伊藤
近藤　昌弘
駿一 片瀬
弘毅 片山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP1983039245U priority Critical patent/JPS59143646U/ja
Publication of JPS59143646U publication Critical patent/JPS59143646U/ja
Application granted granted Critical
Publication of JPS6315005Y2 publication Critical patent/JPS6315005Y2/ja
Granted legal-status Critical Current

Links

JP1983039245U 1983-03-18 1983-03-18 ポリシング盤 Granted JPS59143646U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983039245U JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983039245U JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Publications (2)

Publication Number Publication Date
JPS59143646U true JPS59143646U (ja) 1984-09-26
JPS6315005Y2 JPS6315005Y2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=30169897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983039245U Granted JPS59143646U (ja) 1983-03-18 1983-03-18 ポリシング盤

Country Status (1)

Country Link
JP (1) JPS59143646U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01199762A (ja) * 1988-02-04 1989-08-11 Tdk Corp 研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844956A (ja) * 1981-09-10 1983-03-16 Ricoh Co Ltd ラツプ定盤の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844956A (ja) * 1981-09-10 1983-03-16 Ricoh Co Ltd ラツプ定盤の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01199762A (ja) * 1988-02-04 1989-08-11 Tdk Corp 研磨装置

Also Published As

Publication number Publication date
JPS6315005Y2 (enrdf_load_stackoverflow) 1988-04-26

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