JPS63149961U - - Google Patents
Info
- Publication number
- JPS63149961U JPS63149961U JP2312287U JP2312287U JPS63149961U JP S63149961 U JPS63149961 U JP S63149961U JP 2312287 U JP2312287 U JP 2312287U JP 2312287 U JP2312287 U JP 2312287U JP S63149961 U JPS63149961 U JP S63149961U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- injection hole
- vapor deposition
- electron beam
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312287U JPS63149961U (OSRAM) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2312287U JPS63149961U (OSRAM) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149961U true JPS63149961U (OSRAM) | 1988-10-03 |
Family
ID=30821151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2312287U Pending JPS63149961U (OSRAM) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149961U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56163265A (en) * | 1980-05-19 | 1981-12-15 | Rohm Co Ltd | Vapor depositing apparatus |
-
1987
- 1987-02-19 JP JP2312287U patent/JPS63149961U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56163265A (en) * | 1980-05-19 | 1981-12-15 | Rohm Co Ltd | Vapor depositing apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63149961U (OSRAM) | ||
| DE4336900A1 (de) | Elektronenstrahlquellen-Anordnung | |
| JPS592108Y2 (ja) | フラツシユガン | |
| JPS6350874U (OSRAM) | ||
| JPH01120328U (OSRAM) | ||
| JPH01161259U (OSRAM) | ||
| JPS5690432A (en) | Production of magnetic recording medium | |
| JPS62157968U (OSRAM) | ||
| JPH0189955U (OSRAM) | ||
| JPH0463114U (OSRAM) | ||
| JPS6346462U (OSRAM) | ||
| JPH0399766U (OSRAM) | ||
| JPH01129253U (OSRAM) | ||
| JPH0251259U (OSRAM) | ||
| JPS6073216U (ja) | 磁性膜作製装置 | |
| JPS606429Y2 (ja) | 真空蒸着装置 | |
| JPS63123667U (OSRAM) | ||
| JPH0399776U (OSRAM) | ||
| JPS62101860U (OSRAM) | ||
| JPH0425858U (OSRAM) | ||
| JP2939756B2 (ja) | 真空蒸着装置の蒸発源 | |
| JPS63175155U (OSRAM) | ||
| JPH01161260U (OSRAM) | ||
| JPS6029942A (ja) | 垂直磁気記録体の製造法並に装置 | |
| JPH02140968U (OSRAM) |