JPS6314890B2 - - Google Patents
Info
- Publication number
- JPS6314890B2 JPS6314890B2 JP4470281A JP4470281A JPS6314890B2 JP S6314890 B2 JPS6314890 B2 JP S6314890B2 JP 4470281 A JP4470281 A JP 4470281A JP 4470281 A JP4470281 A JP 4470281A JP S6314890 B2 JPS6314890 B2 JP S6314890B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- stacked
- diaphragms
- pressure
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000000843 powder Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 2
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 2
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000003831 antifriction material Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
- G01L7/082—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4470281A JPS57160035A (en) | 1981-03-28 | 1981-03-28 | Pressure responsive device of laminated metal diaphragm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4470281A JPS57160035A (en) | 1981-03-28 | 1981-03-28 | Pressure responsive device of laminated metal diaphragm |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57160035A JPS57160035A (en) | 1982-10-02 |
JPS6314890B2 true JPS6314890B2 (enrdf_load_stackoverflow) | 1988-04-02 |
Family
ID=12698741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4470281A Granted JPS57160035A (en) | 1981-03-28 | 1981-03-28 | Pressure responsive device of laminated metal diaphragm |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57160035A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4852466A (en) * | 1987-05-15 | 1989-08-01 | The Foxboro Company | Floating diaphragm apparatus |
JP3808230B2 (ja) * | 1999-02-26 | 2006-08-09 | 三菱電機株式会社 | 高圧燃料ポンプの金属ダイヤフラム式脈動吸収装置 |
NL2005673C2 (en) * | 2010-11-11 | 2012-05-14 | Badotherm Proces Instr B V | Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly. |
-
1981
- 1981-03-28 JP JP4470281A patent/JPS57160035A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57160035A (en) | 1982-10-02 |
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