JPS6314871A - 遷移金属炭化物膜の製法 - Google Patents

遷移金属炭化物膜の製法

Info

Publication number
JPS6314871A
JPS6314871A JP15769686A JP15769686A JPS6314871A JP S6314871 A JPS6314871 A JP S6314871A JP 15769686 A JP15769686 A JP 15769686A JP 15769686 A JP15769686 A JP 15769686A JP S6314871 A JPS6314871 A JP S6314871A
Authority
JP
Japan
Prior art keywords
transition metal
titanium
reaction tube
carbide film
benzene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15769686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526869B2 (cs
Inventor
Yoshikazu Yoshimoto
好本　芳和
Tomonari Suzuki
鈴木　友成
Shigeo Nakajima
中島　重夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP15769686A priority Critical patent/JPS6314871A/ja
Publication of JPS6314871A publication Critical patent/JPS6314871A/ja
Publication of JPH0526869B2 publication Critical patent/JPH0526869B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
JP15769686A 1986-07-03 1986-07-03 遷移金属炭化物膜の製法 Granted JPS6314871A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15769686A JPS6314871A (ja) 1986-07-03 1986-07-03 遷移金属炭化物膜の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15769686A JPS6314871A (ja) 1986-07-03 1986-07-03 遷移金属炭化物膜の製法

Publications (2)

Publication Number Publication Date
JPS6314871A true JPS6314871A (ja) 1988-01-22
JPH0526869B2 JPH0526869B2 (cs) 1993-04-19

Family

ID=15655383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15769686A Granted JPS6314871A (ja) 1986-07-03 1986-07-03 遷移金属炭化物膜の製法

Country Status (1)

Country Link
JP (1) JPS6314871A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5695831A (en) * 1995-02-03 1997-12-09 Nec Corporation CVD method for forming a metallic film on a wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5695831A (en) * 1995-02-03 1997-12-09 Nec Corporation CVD method for forming a metallic film on a wafer

Also Published As

Publication number Publication date
JPH0526869B2 (cs) 1993-04-19

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