JPS6314813B2 - - Google Patents

Info

Publication number
JPS6314813B2
JPS6314813B2 JP55105515A JP10551580A JPS6314813B2 JP S6314813 B2 JPS6314813 B2 JP S6314813B2 JP 55105515 A JP55105515 A JP 55105515A JP 10551580 A JP10551580 A JP 10551580A JP S6314813 B2 JPS6314813 B2 JP S6314813B2
Authority
JP
Japan
Prior art keywords
sample
magnetic pole
pole piece
upper magnetic
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55105515A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5730252A (en
Inventor
Yoshinori Aoki
Katsuyoshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP10551580A priority Critical patent/JPS5730252A/ja
Publication of JPS5730252A publication Critical patent/JPS5730252A/ja
Publication of JPS6314813B2 publication Critical patent/JPS6314813B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP10551580A 1980-07-31 1980-07-31 Signal detector in electron microscope Granted JPS5730252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10551580A JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10551580A JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Publications (2)

Publication Number Publication Date
JPS5730252A JPS5730252A (en) 1982-02-18
JPS6314813B2 true JPS6314813B2 (en:Method) 1988-04-01

Family

ID=14409730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10551580A Granted JPS5730252A (en) 1980-07-31 1980-07-31 Signal detector in electron microscope

Country Status (1)

Country Link
JP (1) JPS5730252A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037163U (ja) * 1983-08-22 1985-03-14 日本電子株式会社 走査電子顕微鏡

Also Published As

Publication number Publication date
JPS5730252A (en) 1982-02-18

Similar Documents

Publication Publication Date Title
KR850001390B1 (ko) 2차 전자 검출장치
JP3641288B2 (ja) 標本表面の分析装置
JP4920385B2 (ja) 荷電粒子ビーム装置、走査型電子顕微鏡、及び試料観察方法
EP0113746B1 (en) An elektrode system of a retarding-field spectrometer for a voltage measuring electron beam apparatus
JPH0727556Y2 (ja) 荷電粒子エネルギ分析装置
EP0293924B1 (en) Direct imaging monochromatic electron microscope
US3629579A (en) Electron probe specimen stage with a scattered electron detector mounted thereon
US3717761A (en) Scanning electron microscope
GB2081501A (en) Device for detecting secondary electrons in a scanning electron microscope
US5061856A (en) Corpuscular beam device
JPH08138611A (ja) 荷電粒子線装置
JPH0636346B2 (ja) 荷電粒子線装置及びこれによる試料観察方法
JPS6314813B2 (en:Method)
JP2004259469A (ja) 走査型電子顕微鏡
JPH0319166Y2 (en:Method)
JP3190922B2 (ja) 走査電子顕微鏡
JPH057820B2 (en:Method)
RU2452052C1 (ru) Рентгеновский микроскоп наноразрешения
JPS5854783Y2 (ja) 走査電子顕微鏡
JP3101141B2 (ja) 電子ビーム装置
JPS6342460Y2 (en:Method)
JPH082603Y2 (ja) Ｘ線分析装置
JPS6242443Y2 (en:Method)
JPS5812123Y2 (ja) 電子顕微鏡等におけるｘ線分析装置
JPH01189848A (ja) 荷電ビーム装置