JPS63147138A - Laser scanner - Google Patents

Laser scanner

Info

Publication number
JPS63147138A
JPS63147138A JP29440886A JP29440886A JPS63147138A JP S63147138 A JPS63147138 A JP S63147138A JP 29440886 A JP29440886 A JP 29440886A JP 29440886 A JP29440886 A JP 29440886A JP S63147138 A JPS63147138 A JP S63147138A
Authority
JP
Japan
Prior art keywords
light
laser
axis
signal
axial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29440886A
Other languages
Japanese (ja)
Inventor
Kazuo Ota
一男 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP29440886A priority Critical patent/JPS63147138A/en
Publication of JPS63147138A publication Critical patent/JPS63147138A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make a comparison with a preset reference position signal and to accurately position a laser scanner by irradiating the reflecting surface of a mirror mount shaft part with light from a light emitting element at an external position and detecting its reflected light from a light receiving element at the external reference position. CONSTITUTION:The laser light from the external laser light source is passed through a beam expander 13, reflected by an X-axis mirror 17 and a Y-axis mirror 18, and transmitted through an Ftheta lens 14 to obtain a laser output. The laser light obtained through the Ftheta lens 14 is set initially to the reference point position to which the laser light is lowered at right angles, so the X-axis mirror 17 and Y-axis mirror 18 are positioned at 45 deg. to the optical axis of the laser light. When X-axial positioning is performed, light emitted as a pulse by an X-axial light emitting element 20 is projected on an X-axial reflecting surface 24 provided to a side part of an X-axial mirror mount 19 and its reflected light is detected by an X-axial light receiving element and converted into an electric signal proportional to the light reception position, so that the signal is outputted. Consequently, a comparator compares the signal with the preset reference position signal to hold the laser scanner at the reference position at all times, and the positioning is completed by short-time adjustment.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はレーザ加工機等において、レーザ光を走査する
ための回転型レーザスキャナに関し、その組立精度向上
を図ったレーザスキャノ“に係る。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a rotary laser scanner for scanning laser light in a laser processing machine or the like, and to a laser scanner that improves assembly accuracy.

(従来の技術) 従来、レーザ加工機(レーザマーカ、レーザトリマ)O
A機器、映像等に回転型レーザスキャナが用いられてい
ることがよく知られている。
(Conventional technology) Conventionally, laser processing machines (laser markers, laser trimmers)
It is well known that rotary laser scanners are used in equipment, video, and the like.

第5図は従来のレーザスキャナの取付状態を示した説明
図であり、1は回転型レーザスキャナの駆動制御部2は
ミラーマウントシャフト部3はミラー4は取付ネジ、5
はハウジングを示す。
FIG. 5 is an explanatory diagram showing the mounting state of a conventional laser scanner, in which 1 is a drive control part 2 of a rotary laser scanner, a mirror mount shaft part 3 is a mirror 4, and 5 is a mounting screw.
indicates housing.

従来のレーザスキャナの取付は単純な4点ボルト止めで
固定されていた。
Conventional laser scanners are mounted using simple four-point bolts.

(発明が解決しようとする問題点) 。(Problem that the invention seeks to solve).

このような従来のレーザスキャナは、単純なボルト止め
であったため、ハメアイや位置決めノックピンがないの
で基準位置の設定がしにクク、又、取付、取外しにより
組立再現性がないという欠点があった。
Since such conventional laser scanners were simply bolted together, they had the disadvantage that they did not have fitting eyes or positioning dowel pins, making it difficult to set the reference position, and that assembly was not reproducible due to mounting and dismounting.

このため、光軸調整のため長時間を要し、システムとし
てのダウンタイムが問題となっていたとともに、レーザ
スキャナが代数ある場合は、個々には位置が決められな
いという問題点もあった。
For this reason, it takes a long time to adjust the optical axis, resulting in downtime for the system, and if the laser scanner has an algebra, there is also the problem that the positions cannot be determined individually.

(問題点を解決するための手段及び作用)本発明は、上
記問題点を解決するためになされたものである。
(Means and effects for solving the problems) The present invention has been made to solve the above problems.

すなわち、ミラーマウントシャフト部に反射面を設け、
外部基準位置に設けたでご光素子からの光を該反射面に
あて、同じく外部基準位置に設けた受光素子で反射光を
検出することにより、あらかじめ設定した基準位置信号
と比較してレーザスキャナの位置決めを行うものである
In other words, a reflective surface is provided on the mirror mount shaft,
The light from the optical element installed at the external reference position is applied to the reflective surface, and the reflected light is detected by the light receiving element also installed at the external reference position, and the laser scanner compares it with a preset reference position signal. It is used for positioning.

(実施例) 以下、本発明の実施例を図面によって詳述する。(Example) Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は、本発明によるレーザスキャナの実施例を説明
するための図である。
FIG. 1 is a diagram for explaining an embodiment of a laser scanner according to the present invention.

同図において、11はX軸スキャナ、12はY軸スキャ
ナ、13はビームエキスパンダ、14はFθレンズ、1
5はY軸ミラーマウントシャフト部、16はY軸周発光
素子、17はX軸ミラー、18はY軸ミラー、19はX
軸ミラーマウントシャフ、ト部、20はX軸角発光素子
、21はハウジング、22はY軸受光素子、23はX軸
受光素子、24はX軸度対面、25はY軸度射面をそれ
ぞれ示す。
In the figure, 11 is an X-axis scanner, 12 is a Y-axis scanner, 13 is a beam expander, 14 is an Fθ lens, 1
5 is a Y-axis mirror mount shaft part, 16 is a Y-axis peripheral light emitting element, 17 is an X-axis mirror, 18 is a Y-axis mirror, 19 is an X-axis mirror
Axis mirror mount shaft, G part, 20 is an X-axis angle light emitting element, 21 is a housing, 22 is a Y-axis light receiving element, 23 is an X-axis light receiving element, 24 is an X-axis angle facing side, 25 is a Y-axis angle radiation surface, respectively. show.

第2図は、第1図におけるX方向がら見たX方向矢視図
である。
FIG. 2 is an X-direction arrow view as viewed from the X-direction in FIG. 1.

本実施例では、外部レーザ光源(図示せず)よりのレー
ザ光をビームエキスパンダ13を介して、X軸ミラー1
7、Y軸ミラー18で反射させ、Fθレンズ14を透過
させレーザ出力として取り出すものである。そして、レ
ーザ光を直線的に走査したい場合は、X軸を固定し、Y
軸を回転駆動することにより、又レーザ光を曲線的に走
査したい場合は、X軸、Y軸を同時にyXA動すること
により得られるものである。
In this embodiment, a laser beam from an external laser light source (not shown) is passed through a beam expander 13 to an X-axis mirror 1.
7. The light is reflected by the Y-axis mirror 18, transmitted through the Fθ lens 14, and extracted as a laser output. If you want to scan the laser beam linearly, fix the X axis and
This can be achieved by rotationally driving the axis, or by simultaneously moving the X and Y axes by yXA if it is desired to scan the laser beam in a curved manner.

この場合において、まずFθレンズ14を透過して得ら
れるレーザ光を直角方向に降した基準点位置に初期設定
するには、X軸ミラー1゛7、Y軸ミラー18がレーザ
光軸に対し、それぞれ45°の角度に位置決めされてい
る必要がある。
In this case, first, in order to initially set the laser beam obtained by passing through the Fθ lens 14 to a reference point position where it descends in the perpendicular direction, the Each must be positioned at a 45° angle.

第3図は初期設定するためのシステムブロック図であり
、第4図は、そのフローチャート図である。
FIG. 3 is a system block diagram for initial setting, and FIG. 4 is a flowchart thereof.

発光素子20.16としては、半導体レーザ、赤外LE
D等が用いられ、又、受光素子22.23としては、リ
ニアIC5CCD素子等が用いられる。
As the light emitting element 20.16, a semiconductor laser, an infrared LE
D, etc. are used, and as the light receiving elements 22 and 23, linear IC5CCD elements or the like are used.

今X軸について説明すると、X軸ミラーマウント19の
側部に設けたX軸度射面にX軸角発光素子20よりパル
ス発光された光をあて、その反射光をX軸受光素子22
で検出し、位置信号変換部30にて、受光部位に比例し
た電気信号(P)に変換し出力する。
To explain the X-axis now, pulsed light from the X-axis angular light emitting element 20 is applied to the X-axis incident surface provided on the side of the X-axis mirror mount 19, and the reflected light is sent to the X-axis light receiving element 22.
The position signal converter 30 converts the signal into an electric signal (P) proportional to the light receiving site and outputs the signal.

他方、設計上の基準位置を基準信号設定器31により設
定された基準位置信号(R)と比較器32にて比較され
、判定器33に位置決め完了又は、未完の表示がなされ
る。
On the other hand, a comparator 32 compares the design reference position with a reference position signal (R) set by a reference signal setter 31, and a determination unit 33 indicates whether positioning is complete or incomplete.

尚、Y軸についても、X軸と同様である。Note that the Y axis is also similar to the X axis.

(発明の9)果) 以上の説明から明らかなように、本発明によれば、固定
位置から発光素子による光を受、ける受光面(反射面)
をミラーマウントシャフト部に設け、この面からの反射
光を同じく固定位置に設置した充電変換素子(リニアt
Cなど)により位置信号に変換し、あらかじめ設定した
基準位置信号と比較器にてチェックすることで位置決め
を完了するので、常時基準位置が保持でき、単時間の調
整で完了できるとともに、位置フィードバック信号とし
て利用することもできる。
(9) Effect of the Invention) As is clear from the above description, according to the present invention, the light receiving surface (reflecting surface) receives light from the light emitting element from a fixed position.
is installed on the mirror mount shaft, and the reflected light from this surface is converted into a charge conversion element (linear t
Since positioning is completed by converting it into a position signal using a preset reference position signal (e.g. C) and checking it with a preset reference position signal using a comparator, the reference position can be maintained at all times, and the adjustment can be completed in a single time. It can also be used as

なお、この方法を採用しても、スキャナの高速反答性に
は全く形容を与えないものである。
Note that even if this method is adopted, it does not affect the high-speed responsiveness of the scanner at all.

【図面の簡単な説明】[Brief explanation of the drawing]

舊1図は本発明によるレーザスキャナの要部断面図、第
2図は第1図におけるX方向矢視図、第3図は初期設定
のためのシステムブロック図、第4図は初期設定のため
のフローチャート図、第5図は従来のレーザスキャナの
取付状態を示す説明図である。 11・・・X軸スキャナ    12・・・Y軸スキャ
ナ13・・・ビームエキスパンダ 14・・・Fθレン
ズ15・・・Y軸ミラーマウンI・シャフト部 。 16・・・Y軸周発光素子   17・・・X軸ミラー
18・・・Y軸ミラー
Figure 1 is a sectional view of the main parts of the laser scanner according to the present invention, Figure 2 is a view taken in the X direction in Figure 1, Figure 3 is a system block diagram for initial settings, and Figure 4 is for initial settings. FIG. 5 is an explanatory diagram showing the mounting state of a conventional laser scanner. 11...X-axis scanner 12...Y-axis scanner 13...beam expander 14...Fθ lens 15...Y-axis mirror mount I/shaft section. 16...Y-axis circumferential light emitting element 17...X-axis mirror 18...Y-axis mirror

Claims (1)

【特許請求の範囲】[Claims] 回転駆動型レーザスキャナのミラーマウントシャフト部
に設けた反射面と、該反射面に投光する発光素子と、該
反射面から反射光を受光する受光素子と、該受光素子か
らの検出信号と基準信号とを比較する判定器とからなる
ことを特徴とするレーザスキャナ。
A reflective surface provided on the mirror mount shaft of a rotationally driven laser scanner, a light emitting element that emits light onto the reflective surface, a light receiving element that receives reflected light from the reflective surface, and a detection signal and reference from the light receiving element. 1. A laser scanner comprising: a determiner for comparing a signal with a signal.
JP29440886A 1986-12-10 1986-12-10 Laser scanner Pending JPS63147138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29440886A JPS63147138A (en) 1986-12-10 1986-12-10 Laser scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29440886A JPS63147138A (en) 1986-12-10 1986-12-10 Laser scanner

Publications (1)

Publication Number Publication Date
JPS63147138A true JPS63147138A (en) 1988-06-20

Family

ID=17807358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29440886A Pending JPS63147138A (en) 1986-12-10 1986-12-10 Laser scanner

Country Status (1)

Country Link
JP (1) JPS63147138A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223710U (en) * 1988-07-28 1990-02-16
US6703603B2 (en) 2001-11-28 2004-03-09 Hitachi Via Mechanics, Ltd. Controller for optical scanner
US6849824B2 (en) 2002-12-26 2005-02-01 Hitachi Via Mechanics, Ltd. Multibeam laser drilling apparatus
US7923659B2 (en) * 2006-08-31 2011-04-12 Hitachi Via Mechanics, Ltd. Laser machining method and laser machining apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0223710U (en) * 1988-07-28 1990-02-16
US6703603B2 (en) 2001-11-28 2004-03-09 Hitachi Via Mechanics, Ltd. Controller for optical scanner
US6849824B2 (en) 2002-12-26 2005-02-01 Hitachi Via Mechanics, Ltd. Multibeam laser drilling apparatus
US7923659B2 (en) * 2006-08-31 2011-04-12 Hitachi Via Mechanics, Ltd. Laser machining method and laser machining apparatus

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