JPS63145329U - - Google Patents

Info

Publication number
JPS63145329U
JPS63145329U JP3675287U JP3675287U JPS63145329U JP S63145329 U JPS63145329 U JP S63145329U JP 3675287 U JP3675287 U JP 3675287U JP 3675287 U JP3675287 U JP 3675287U JP S63145329 U JPS63145329 U JP S63145329U
Authority
JP
Japan
Prior art keywords
wafer
arm
holding surface
buffer member
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3675287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3675287U priority Critical patent/JPS63145329U/ja
Publication of JPS63145329U publication Critical patent/JPS63145329U/ja
Pending legal-status Critical Current

Links

JP3675287U 1987-03-13 1987-03-13 Pending JPS63145329U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3675287U JPS63145329U (enrdf_load_stackoverflow) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3675287U JPS63145329U (enrdf_load_stackoverflow) 1987-03-13 1987-03-13

Publications (1)

Publication Number Publication Date
JPS63145329U true JPS63145329U (enrdf_load_stackoverflow) 1988-09-26

Family

ID=30847451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3675287U Pending JPS63145329U (enrdf_load_stackoverflow) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPS63145329U (enrdf_load_stackoverflow)

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