JPS63164228U - - Google Patents

Info

Publication number
JPS63164228U
JPS63164228U JP5710287U JP5710287U JPS63164228U JP S63164228 U JPS63164228 U JP S63164228U JP 5710287 U JP5710287 U JP 5710287U JP 5710287 U JP5710287 U JP 5710287U JP S63164228 U JPS63164228 U JP S63164228U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
throttle valve
vertical beam
movable throttle
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5710287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5710287U priority Critical patent/JPS63164228U/ja
Publication of JPS63164228U publication Critical patent/JPS63164228U/ja
Pending legal-status Critical Current

Links

JP5710287U 1987-04-15 1987-04-15 Pending JPS63164228U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5710287U JPS63164228U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5710287U JPS63164228U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Publications (1)

Publication Number Publication Date
JPS63164228U true JPS63164228U (enrdf_load_stackoverflow) 1988-10-26

Family

ID=30886502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5710287U Pending JPS63164228U (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPS63164228U (enrdf_load_stackoverflow)

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