JPS63145291U - - Google Patents

Info

Publication number
JPS63145291U
JPS63145291U JP3836187U JP3836187U JPS63145291U JP S63145291 U JPS63145291 U JP S63145291U JP 3836187 U JP3836187 U JP 3836187U JP 3836187 U JP3836187 U JP 3836187U JP S63145291 U JPS63145291 U JP S63145291U
Authority
JP
Japan
Prior art keywords
heating element
support
support hole
support device
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3836187U
Other languages
English (en)
Other versions
JPH047598Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987038361U priority Critical patent/JPH047598Y2/ja
Publication of JPS63145291U publication Critical patent/JPS63145291U/ja
Application granted granted Critical
Publication of JPH047598Y2 publication Critical patent/JPH047598Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の発熱体支持装置の実施例を
示す図、第２図は炉体を示す断面図、第３図は第
１図に示した発熱体支持装置によつて支持される
発熱抵抗体を示す図、第４図は第１図に示した発
熱体支持装置の分解斜視図、第５図は第４図に示
した発熱体支持装置の組立断面図である。 ２……支持片（支持部材）、４……凹部、６…
…支持孔、８……発熱抵抗体（発熱体）。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 発熱体の支持部材に、発熱体を通して支持
    させる支持孔を形成し、この支持孔を発熱体の移
    動を許容する形状に設定した発熱体支持装置。 (2) 前記支持孔は、支持部材間に形成された凹
    部を、結合して得られる実用新案登録請求の範囲
    第１項に記載の発熱体支持装置。
JP1987038361U 1987-03-16 1987-03-16 Expired JPH047598Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987038361U JPH047598Y2 (ja) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987038361U JPH047598Y2 (ja) 1987-03-16 1987-03-16

Publications (2)

Publication Number Publication Date
JPS63145291U true JPS63145291U (ja) 1988-09-26
JPH047598Y2 JPH047598Y2 (ja) 1992-02-27

Family

ID=30850533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987038361U Expired JPH047598Y2 (ja) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPH047598Y2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187771A (en) * 1990-11-13 1993-02-16 Tokyo Electron Sagami Limited Heat processing apparatus utilizing a plurality of stacked heater holders
JPH1167424A (ja) * 1997-08-20 1999-03-09 Kokusai Electric Co Ltd ヒータ支持装置
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム
CN102300345A (zh) * 2010-06-25 2011-12-28 山特维克热传动公司 用于加热元件线圈的支撑结构

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367941U (ja) * 1976-11-10 1978-06-07
JPS6358493U (ja) * 1986-10-03 1988-04-19

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586620A (ja) * 1981-07-03 1983-01-14 Toshiba Corp シユミツトトリガ回路

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367941U (ja) * 1976-11-10 1978-06-07
JPS6358493U (ja) * 1986-10-03 1988-04-19

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187771A (en) * 1990-11-13 1993-02-16 Tokyo Electron Sagami Limited Heat processing apparatus utilizing a plurality of stacked heater holders
JPH1167424A (ja) * 1997-08-20 1999-03-09 Kokusai Electric Co Ltd ヒータ支持装置
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム
CN102300345A (zh) * 2010-06-25 2011-12-28 山特维克热传动公司 用于加热元件线圈的支撑结构
JP2012009442A (ja) * 2010-06-25 2012-01-12 Sandvik Thermal Process Inc 加熱エレメント・コイルの支持構造
EP2400815A3 (en) * 2010-06-25 2012-10-24 Sandvik Thermal Process, Inc. Support structure for heating element coil

Also Published As

Publication number Publication date
JPH047598Y2 (ja) 1992-02-27

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