JPS63145074U - - Google Patents
Info
- Publication number
- JPS63145074U JPS63145074U JP3801787U JP3801787U JPS63145074U JP S63145074 U JPS63145074 U JP S63145074U JP 3801787 U JP3801787 U JP 3801787U JP 3801787 U JP3801787 U JP 3801787U JP S63145074 U JPS63145074 U JP S63145074U
- Authority
- JP
- Japan
- Prior art keywords
- manifold
- terminal block
- solenoid valve
- terminal
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 description 1
Landscapes
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038017U JPH0339655Y2 (enExample) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038017U JPH0339655Y2 (enExample) | 1987-03-16 | 1987-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63145074U true JPS63145074U (enExample) | 1988-09-26 |
| JPH0339655Y2 JPH0339655Y2 (enExample) | 1991-08-21 |
Family
ID=30849868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987038017U Expired JPH0339655Y2 (enExample) | 1987-03-16 | 1987-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339655Y2 (enExample) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840183A (ja) * | 1981-09-04 | 1983-03-09 | アルプス電気株式会社 | 脱脂洗浄装置 |
| JPS60137717A (ja) * | 1983-12-23 | 1985-07-22 | Musashi Kogyo Kk | 洗浄用搬送装置 |
| JPS6157282A (ja) * | 1984-08-30 | 1986-03-24 | ソニツク・フエロ−株式会社 | 洗浄装置 |
| JPS61185931A (ja) * | 1985-02-14 | 1986-08-19 | Oki Electric Ind Co Ltd | 半導体ウエハの洗浄装置 |
| JPS6231984U (enExample) * | 1985-08-09 | 1987-02-25 |
-
1987
- 1987-03-16 JP JP1987038017U patent/JPH0339655Y2/ja not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840183A (ja) * | 1981-09-04 | 1983-03-09 | アルプス電気株式会社 | 脱脂洗浄装置 |
| JPS60137717A (ja) * | 1983-12-23 | 1985-07-22 | Musashi Kogyo Kk | 洗浄用搬送装置 |
| JPS6157282A (ja) * | 1984-08-30 | 1986-03-24 | ソニツク・フエロ−株式会社 | 洗浄装置 |
| JPS61185931A (ja) * | 1985-02-14 | 1986-08-19 | Oki Electric Ind Co Ltd | 半導体ウエハの洗浄装置 |
| JPS6231984U (enExample) * | 1985-08-09 | 1987-02-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339655Y2 (enExample) | 1991-08-21 |