JPS63145074U - - Google Patents

Info

Publication number
JPS63145074U
JPS63145074U JP3801787U JP3801787U JPS63145074U JP S63145074 U JPS63145074 U JP S63145074U JP 3801787 U JP3801787 U JP 3801787U JP 3801787 U JP3801787 U JP 3801787U JP S63145074 U JPS63145074 U JP S63145074U
Authority
JP
Japan
Prior art keywords
manifold
terminal block
solenoid valve
terminal
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3801787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339655Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987038017U priority Critical patent/JPH0339655Y2/ja
Publication of JPS63145074U publication Critical patent/JPS63145074U/ja
Application granted granted Critical
Publication of JPH0339655Y2 publication Critical patent/JPH0339655Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP1987038017U 1987-03-16 1987-03-16 Expired JPH0339655Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987038017U JPH0339655Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987038017U JPH0339655Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Publications (2)

Publication Number Publication Date
JPS63145074U true JPS63145074U (enrdf_load_stackoverflow) 1988-09-26
JPH0339655Y2 JPH0339655Y2 (enrdf_load_stackoverflow) 1991-08-21

Family

ID=30849868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987038017U Expired JPH0339655Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPH0339655Y2 (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840183A (ja) * 1981-09-04 1983-03-09 アルプス電気株式会社 脱脂洗浄装置
JPS60137717A (ja) * 1983-12-23 1985-07-22 Musashi Kogyo Kk 洗浄用搬送装置
JPS6157282A (ja) * 1984-08-30 1986-03-24 ソニツク・フエロ−株式会社 洗浄装置
JPS61185931A (ja) * 1985-02-14 1986-08-19 Oki Electric Ind Co Ltd 半導体ウエハの洗浄装置
JPS6231984U (enrdf_load_stackoverflow) * 1985-08-09 1987-02-25

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840183A (ja) * 1981-09-04 1983-03-09 アルプス電気株式会社 脱脂洗浄装置
JPS60137717A (ja) * 1983-12-23 1985-07-22 Musashi Kogyo Kk 洗浄用搬送装置
JPS6157282A (ja) * 1984-08-30 1986-03-24 ソニツク・フエロ−株式会社 洗浄装置
JPS61185931A (ja) * 1985-02-14 1986-08-19 Oki Electric Ind Co Ltd 半導体ウエハの洗浄装置
JPS6231984U (enrdf_load_stackoverflow) * 1985-08-09 1987-02-25

Also Published As

Publication number Publication date
JPH0339655Y2 (enrdf_load_stackoverflow) 1991-08-21

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