JPS63143569U - - Google Patents
Info
- Publication number
- JPS63143569U JPS63143569U JP3546487U JP3546487U JPS63143569U JP S63143569 U JPS63143569 U JP S63143569U JP 3546487 U JP3546487 U JP 3546487U JP 3546487 U JP3546487 U JP 3546487U JP S63143569 U JPS63143569 U JP S63143569U
- Authority
- JP
- Japan
- Prior art keywords
- ion gas
- sputtering
- chamber
- generation section
- gas generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546487U JPS63143569U (sv) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546487U JPS63143569U (sv) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63143569U true JPS63143569U (sv) | 1988-09-21 |
Family
ID=30844983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3546487U Pending JPS63143569U (sv) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63143569U (sv) |
-
1987
- 1987-03-11 JP JP3546487U patent/JPS63143569U/ja active Pending
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